29 September - 3 October 2024
Monterey, California, US

Thank you for joining us in Monterey

Your participation helped make this an incredible event—the premier worldwide technical meeting for photomasks, patterning, metrology, materials, inspection/repair, mask business, extreme UV lithography, and emerging technologies. We are grateful for the time you spent with us, talking with scientists and engineers to share the spontaneous ideas that only happen when we gather in person.

Save the dates for next year's event: 21 - 25 September 2025

#SPIEPhotomaskEUV Twitter logo Facebook logo Instagram logo Youtube logo Linkedin logo

Explore the two conferences


Photomask technology
Extreme ultraviolet lithography technology

Don't miss the exhibition


The mask-making industry's premier event

Attend the premier exhibition for mask makers, EUVL, emerging technologies, and mask business. Connect with top suppliers showcasing the newest products, innovations, and latest technologies.

Attention students


Student opportunities

Find ways to learn about the technology, the industry, and make important connections for your future. This event includes special awards, sessions, and grants for students—learn how to attend for free in 2025!

View the award recipients


See the accomplishments

Award recipients from SPIE Photomask Technology + Extreme Ultraviolet Lithography gain the recognition they deserve. Celebrate the important work being done and further help the industry support student participation. View previous recipients; this year's recipients will be shared soon.