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A conference program has been built with all the great content you expect at SPIE Advanced Lithography + Patterning

Prepare to join other leading researchers who are solving challenges in optical and EUV lithography, patterning technologies, metrology, and process integration for semiconductor manufacturing and adjacent applications. Your colleagues look forward to seeing you in San Jose.
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Five days of exciting content and connecting with your community

  • Plenary talks
  • Technical presentations
  • Networking sessions
  • Course offerings
  • Exhibition

Explore six great conferences

  • Optical and EUV Nanolithography
  • DTCO and Computational Patterning
  • Metrology, Inspection, and Process Control
  • Novel Patterning Technologies
  • Advances in Patterning Materials and Processes
  • Advanced Etch Technology and Process Integration for Nanopatterning

2022 Plenary presentations: come to hear from experts


Luc Van den Hove, President & CEO, imec (Belgium) -- a plenary speaker at the 2022 event

Luc Van den Hove

President & CEO, imec (Belgium), presents: The power of deeptech: a tale of bits, molecules and ecosystems

H.S. Philip Wong, Department of Electrical Engineering, Standford (USA) -- a plenary speaker at the 2022 event

H.S. Philip Wong

Department of Electrical Engineering, Standford (USA), presents: Does lithography still matter after high NA EUV?

Add a course to your conference experience


Choose from a selection of highly valuable topics

Advance your career and expand your skill set with instructional opportunities. Seven courses are available in San Jose.

Exhibition at Advanced Lithography + Patterning


Connect with the semiconductor community

The exhibition at Advanced Lithography + Patterning is where people gather to collaborate and to get business done.

Thank you to the following supporting organizations


Student information, scholarships, and opportunities


Share information for students with your networks

SPIE Advanced Lithography + Patterning offers numerous opportunities for students to engage and learn about the industry, as well as share their latest research. The best part? Leading companies support student participation by providing scholarships.

Find past proceedings in the SPIE Digital Library


Access the 2021 research and recordings

SPIE Advanced Lithography 2021 conference proceedings papers and presentation recordings are published in the SPIE Digital Library as they become available. All 2021 paid conference registrations included one volume for ongoing access.

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