SPIE Advanced Lithography + Patterning

The conference for emerging technology in the semiconductor industry

A conference program has been built with all the great content you expect at SPIE Advanced Lithography + Patterning

Prepare to join other leading researchers who are solving challenges in optical and EUV lithography, patterning technologies, metrology, and process integration for semiconductor manufacturing and adjacent applications. Your colleagues look forward to seeing you in San Jose.

#SPIElitho

Five days of exciting content and connecting with your community

Plenary talks
Technical presentations
Networking sessions
Course offerings
Exhibition

Presenter at SPIE Advanced Lithography + Patterning

Explore six great conferences

Optical and EUV Nanolithography
DTCO and Computational Patterning
Metrology, Inspection, and Process Control
Novel Patterning Technologies
Advances in Patterning Materials and Processes
Advanced Etch Technology and Process Integration for Nanopatterning

2022 Plenary presentations: come to hear from experts

Luc Van den Hove

President & CEO, imec (Belgium), presents: The power of deeptech: a tale of bits, molecules and ecosystems

H.S. Philip Wong

Department of Electrical Engineering, Standford (USA), presents: Does lithography still matter after high NA EUV?

Add a course to your conference experience

Choose from a selection of highly valuable topics

Advance your career and expand your skill set with instructional opportunities. Seven courses are available in San Jose.

Attendees of SPIE Advanced Lithography + Patterning take a course

Exhibition at Advanced Lithography + Patterning

Connect with the semiconductor community

The exhibition at Advanced Lithography + Patterning is where people gather to collaborate and to get business done.

Student information, scholarships, and opportunities

Share information for students with your networks

SPIE Advanced Lithography + Patterning offers numerous opportunities for students to engage and learn about the industry, as well as share their latest research. The best part? Leading companies support student participation by providing scholarships.

Student authors at SPIE Advanced Lithography + Patterning meet and network

Find past proceedings in the SPIE Digital Library

Access the 2021 research and recordings

SPIE Advanced Lithography 2021 conference proceedings papers and presentation recordings are published in the SPIE Digital Library as they become available. All 2021 paid conference registrations included one volume for ongoing access.

Person browses SPIE Proceedings in SPIE Digital Library