Share your research:
Accepting post-deadline submissions

Share your research, challenges, and breakthroughs with colleagues in San Jose

The call for papers is open. Submit your abstract and join other leading researchers who are solving challenges in optical and EUV lithography, patterning technologies, metrology, and process integration for semiconductor manufacturing and adjacent applications.

Conferences and courses: 25 - 29 February 2024
Exhibition: 27 - 28 February 2024
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Explore six great conferences

  • Optical and EUV Nanolithography
  • DTCO and Computational Patterning
  • Metrology, Inspection, and Process Control
  • Novel Patterning Technologies
  • Advances in Patterning Materials and Processes
  • Advanced Etch Technology and Process Integration for Nanopatterning

Add a course to your conference experience

Choose from a selection of highly valuable topics

Advance your career and expand your skill set with instructional opportunities. Several courses will be available in San Jose.

Exhibition at Advanced Lithography + Patterning

Connect with the semiconductor community

The exhibition at Advanced Lithography + Patterning is where people gather to collaborate and to get business done. Find these technology solutions and more:
• Ultrafast, high-resolution optical imaging and spectroscopy
• Photoresist, EUV, and other specialty materials
• E-beam lithography systems
• Precision cleaning, contamination, transport support materials
• Wafer treatments and substrates

Join a free webinar

Learn about career opportunities

Students and others are encouraged to register for this free webinar covering the basics of semiconductor lithography, the careers available, and a preview of Advanced Lithography + Patterning 2024. Opportunities for students to apply for full funding to attend the event will be included in the discussion.

Date: 3 November 2023
Time: 8:00 AM PT

Opportunities for students

Students: Learn how to attend this event for free

SPIE Advanced Lithography + Patterning offers numerous opportunities for students to engage and learn about the semiconductor industry, as well as share their latest research in lithography and photomask technologies. Leading companies support student participation through grants and awards, and tech groups offer scholarships for graduate and undergraduate applicants.

Proceedings will be published on the SPIE Digital Library

Presentations become published works

SPIE Advanced Lithography + Patterning conference proceedings are published in the SPIE Digital Library. All paid conference registrations include proceeding downloads with ongoing access through your SPIE account.

Visit the Digital Library to see all past years of proceedings from this meeting.

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