Join your colleagues in Monterey

Make plans to join the premier worldwide technical meeting for photomasks, patterning, metrology, materials, inspection/repair, mask business, extreme ultraviolet lithography, and emerging technologies. Escape the day-to-day and talk with scientists and engineers to share the spontaneous ideas that only happen when we gather in person.

Discuss your product requirements with top suppliers at the free two-day exhibition. Meet with industry partners who can help you solve problems, cut costs, and increase your capabilities. Register now and make plans to attend.

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Browse the most current program content online

Browse the program online

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  • Plenary talks
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Details at your fingertips. Download program PDF for easy reference on your device.

Technical Program PDF

Download the technical program for easy reference on your device.
(Coming soon—available end of September)

Explore the 2023 conferences

Photomask technology
Extreme ultraviolet lithography technology

Come to hear outstanding plenary speakers

Don't miss the exhibition

The mask-making industry's premier event

Attend the premier exhibition for mask makers, EUVL, emerging technologies, and mask business. Connect with top suppliers showcasing the newest products, innovations, and latest technologies.

Attention students

Student opportunities

Find ways to learn about the technology, the industry, and make important connections for your future. This event includes special awards, sessions, and sponsorships for students.

BACUS Webinar: Overview of Photomask Technology

Glen Scheid of Micron gives an overview of Photomask Technology. Hosted by Doug Resnick of Canon Nanotechnologies Inc.

View the award recipients

See who won in 2022

View the winners announced at the SPIE Photomask Technology + Extreme Ultraviolet Lithography 2022. Celebrate the important work being done and further help the industry support student participation. View the 2022 winners and start planning for the 2023 award submissions.