Contribute your research and help to build another outstanding program for 2022

Make plans to join the premier worldwide technical meeting for photomasks, patterning, metrology, materials, inspection/repair, mask business, extreme UV lithography, and emerging technologies.

Present your research in Monterey. The call for papers is open.

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CHIPS for America Act – Watch the recording

Congress is poised to support microelectronics manufacturing at an unprecedent level through funding of the Creating Helpful Incentives to Produce Semiconductors (CHIPS) for America Act.

Listen to the informative session that was recently hosted by SPIE, NIST, and the US Dept. of Commerce, regarding the opportunity to strengthen the US domestic semiconductor industry.

Explore the two conferences to see where your research fits best


Photomask technology
Extreme ultraviolet lithography technology

Present your research: Abstract submissions due 4 May


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View the 2021 award recipients


See who won in 2021

View the winners announced at the SPIE Photomask Technology + Extreme Ultraviolet Lithography 2021 Digital Forum. Celebrate the important work being done and further help the industry support student participation. View the 2021 winners and start planning for the 2022 award submissions.

Attention students


Student opportunities

Find ways to learn about the technology, the industry, and make important connections for your future. This event includes special awards, sessions, and sponsorships for students. See what happened in 2021 and check back soon for 2022 opportunities.

Don't miss the exhibition


The mask-making industry's premier event

Attend the premier exhibition for mask makers, EUVL, emerging technologies, and mask business. Connect with top suppliers showcasing the newest products, innovations, and latest technologies.