SPIE Photomask Technology + EUVL registration information

Find the details you need to register for the 2022 event in Monterey

Registration will open in June 2022


We look forward to seeing you in 2022. Stay connected and sign up to be notified about SPIE Photomask Technology + EUV Lithography.

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Review SPIE event policies

SPIE Member, SPIE Student Member, and student pricing


SPIE Members receive conference and course registration discounts. Discounts are applied at the time of registration.

SPIE Student Members receive a 50% discount on all SPIE courses.

Student authors and presenters may register at the student rate as long as they meet the definition of a student.

Student registration rates are available only to undergraduate and graduate students who are enrolled full time and have not yet received their Ph.D. Post-docs may not register as students. A student ID number or proof of student status is required with your registration.

Press registration


For credentialed press and media representatives only. Please email contact information, title, and organization to media@spie.org

U.S. Government credit cards


U.S. Government credit card users: have your purchasing officer contact the credit card company and get prior authorization before attempting to register. Advise your purchasing agent that SPIE is considered a 5968 company for authorization purposes.

Contact SPIE Customer Service


E-mail: customerservice@spie.org
Phone: +1 360 676 3290 or +1 888 504 8171
Fax: +1 360 647 1445

Hours of operation
8:00 am to 5:00 pm Pacific Time, Monday - Friday

Universal Time
1500 - 0100 November - March
1400 - 0000 April - October