Information for authors and presenters

Information for authors, chairs, and committees: instructions, deadlines, and tips

We hope to see you in 2022

Find links to presenter instructions, important dates, and other information for a successful abstract submission and presentation at SPIE Photomask Technology + EUV Lithography.

The 2022 call for papers is now open.

Practicing his presention, this author prepares for his photomask technology and EUVL presentation

Benefits of presenting and publishing your work with SPIE


Here's why publishing with SPIE puts a spotlight on your work:

  • The event will bring you international visibility
  • Your research becomes a part of the world's permanent scientific record
  • Your work will be indexed in all relevant scientific databases*

Make sure that your research gets timely publication in the SPIE Digital Library.

*SPIE partners with relevant scientific databases to ensure visibility for your research, including Astrophysical Data System (ADS), Ei Compendex, CrossRef, Google Scholar, Inspec, Scopus, and Web of Science Conference Proceedings Citation Index.

Important dates


Abstracts due 4 May 2022
Authors notified and program posts online 5 July 2022
Submission system opens for manuscripts and poster videos/PDFs* 18 July 2022
Post-deadline abstracts due: Submit via conference listings 1 August 2022
Manuscripts due 1 September 2022
Poster videos/PDFs due for onsite preview 1 September 2022
Advance upload deadline for oral presentation slides** 24 September 2022

*Contact author or speaker must register prior to uploading
**After this date slides must be uploaded onsite at Speaker Check-in

Preparing for your participation


Presenter at Photomask Technology and EUV Lithography

Prepare to present

Review deadlines and resources for preparing your presentation.

An author prepares to submit her manuscript on spie.org

Prepare your manuscript

Manuscript submission guidelines.

Chairs at Photomask Technology and EUV Lithography

Chairs and committees

Timelines and overview of your duties before and during the conference.

#SPIEphotomaskEUV

Find tips and tricks for promoting your presentation to your networks via social media and email.

Twitter logo Facebook logo Instagram logo Youtube logo Linkedin logo