Bakshi, Vivek

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Dr. Vivek Bakshi

President
EUV Litho Inc
Regular Member

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Area of Expertise: EUV Lithography, Lithography, Semiconductor Manufacturing, Plasma Machines, Plasma Diagnostics
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Summary
Dr. Vivek Bakshi is the president of EUV Litho, Inc., an organization that he formed to promote EUV Lithography via consulting, workshops and education courses. He is a consultant in the area of EUV Lithography and lithography in general. He provides consulting services to investors, funding agencies, universities, national labs and suppliers. He also organizes International Workshop on EUV Lithography, EUV and Soft X-ray Sources and teaches EUV Lithography short courses around the world.

Previously, he was a senior member of the technical staff in SEMATECH’s Lithography Division. Dr. Bakshi has authored/co-authored over 125 technical publications, including book chapters, articles in the peer-reviewed journals, technical reports and trade publications. He has edited two books on EUV Lithography: EUV Sources for Lithography (SPIE Press, 2006) and EUV Lithography (SPIE Press, 2008). He is currently Associate Editor of JM3 (SPIE Journal of Micro/Nano Lithography, MEMS and MOEMS) and Blogger at SST (http://www.electroiq.com/blogs/euvl-focus.html).
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