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If you are seeking permission to use previously published material, please contact ReprintPermissions@SPIE.org. In your e-mail, please include the following information:

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Requests may also be faxed to SPIE at +1 360 647 1445 (Attention: Reprint Permissions).

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The Journal of Micro/Nanolithography, MEMS, and MOEMS

Publishes peer reviewed papers on the development of technologies necessary to address the future needs of the electronics, micro-opto electromechanical (MEMS and MOEMS), and photonics industries.

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