Iida, Susumu

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Dr. Susumu Iida

Senior Researcher
EIDEC


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Susumu Iida received his BS and MS degrees in 1995 and 1997, respectively; and later in 2000 he earned his Ph.D. in electronics, all from the Shizuoka University, Japan. He joined the Research and Development Center, Toshiba Corporation, where he carried out research on GaN based blue laser diode. In 2006, he was assigned to AMiT (Advanced Mask Inspection Technology Corporation), where he carried out the development of light source and optics of DUV defect inspection tools. In 2011, he was assigned to EIDEC, and since then he has been engaged in the development of patterned mask inspection.
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