Mack, Chris A.

Company Website

Dr. Chris A. Mack

Gentleman Scientist
Fractilia LLC
Fellow Member

SPIE Involvement: Retrieving Data, please wait...


Area of Expertise: Photolithography, Modeling, Microlithography, Stochastic Modeling
CONTACT DETAILS
Sign In to send a private message or view contact details
Profile
Summary
Chris A. Mack received Bachelor of Science degrees in physics, chemistry, electrical engineering, and chemical engineering from Rose-Hulman Institute of Technology in 1982, a Master of Science degree in electrical engineering from the University of Maryland in 1989, and a Ph.D. in chemical engineering from the University of Texas at Austin in 1998. Mr. Mack founded FINLE Technologies, the developer of the lithography simulation software PROLITH, in 1990, serving as President and Chief Technical Officer until the acquisition of FINLE by KLA-Tencor in 2000. For the next five years he served as Vice President of Lithography Technology for KLA-Tencor. In 2003 he received the SEMI Award for North America for his efforts in lithography simulation and education. He became a fellow of SPIE in 2006, and a fellow of IEEE in 2010. In 2009 he received the SPIE Frits Zernike Award for Microlithography. He is also an adjunct faculty member at the University of Texas at Austin and spent the Fall 2006 semester as a visiting professor at the University of Notre Dame. He has recently completed a comprehensive graduate-level textbook on optical lithography, Fundamental Principles of Optical Lithography, published in late 2007. In 2012 he become Editor-In-Chief of the Journal of Micro/Nanolithography, MEMS, and MOEMS (JM3). Currently, he writes, teaches, and consults on the field of semiconductor microlithography in Austin, Texas.
Upcoming
Presentations
Most Recent | Show All
Retrieving Data, please wait...
Publications Most Recent | Show All
Retrieving Data, please wait...
Conference Committee
Involvement
Most Recent | Show All
Retrieving Data, please wait...
Course Instructor Most Recent | Show All
Retrieving Data, please wait...
Newsroom Most Recent | Show All
Retrieving Data, please wait...