Yen, Anthony

Dr. Anthony Yen

VP and Head, Technology Development Centers, ASML
Fellow Member

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Area of Expertise: Semiconductor Lithography, Semiconductor Fabrication Technology, Classical Optics, Optical Physics, Technology Strategy
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Anthony (Tony) Yen is VP and Head of Technology Development Centers Worldwide, ASML. From 1997 to 2016, except for three years at Cymer as head of its marketing organization, he was with TSMC where he was responsible first for microlithography of TSMC's 0.25, 0.18, 0.15, and 0.13 micron generations of logic integrated circuits and then for building infrastructure of next-generation lithography technologies at SEMATECH, and from 2008 to 2016, for developing EUV lithography and its mask technology for use in high-volume manufacturing. From 1991 to 1997, at Texas Instruments, he worked on various techniques, including early investigations on optical proximity correction, to enhance the practical resolution of microlithography. Tony is a graduate of Purdue University with a BS degree in electrical engineering. He received his SM, EE, and PhD degrees in electrical engineering from MIT, and his MBA degree from MIT’s Sloan School of Management. He has over 100 US patents and 90 publications, and is a fellow of SPIE and of IEEE.
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