Acoustic wave actuator on thin film lithium niobate for acousto-optic modulators

Acousto-optic modulator (AOM) is a key optical component functioning in a wide range of applications such as optical networks, internet of things (IOT) and quantum computing systems. AOMs compared to electro-optic modulators consume less power and have unique functionalities of narrow bandwidth and frequency modulation. Despite the maturity of silicon fabrication processes, silicon lacks the intrinsic photo-elasticity property required for optical modulation. Thin film lithium niobate (TFLN) has high photo-elasticity and piezoelectricity coefficients, enabling integration of AOM within a single material. Here we report on the simulation, fabrication and characterization of the acoustic actuators, as a key unit of an AOM, within a standard thin film LNOI PIC platform, applicable in an integrated gyroscope.