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SPIE Advanced Lithography 2016|Register Today

Journal of Micro/Nanolithography, MEMS, and MOEMS

Celebrate the International Year of Light 2015 with 15% off printed books and proceedings. Shop now.

Micro/Nano Lithography

Implications of industry template adoption at 10 and 7nm
A novel technique for optimally determining a limited set of layout patterns called templates accounts for circuit needs and navigates sources of process variability with no power, performance, or area penalty.
Femtosecond lasers enable the local modification of the composition of glass, allowing the generation of high-contrast refractive microstructures for advanced optical applications.
26 November 2015
A novel method for fusing crystal- and silicon-photonics technologies exhibits a high quality factor, showing promise for the realization of all-optical signal processing on a chip.
17 November 2015
Advancements in processing and design enable printed electronics for applications including ultra-low-cost sensors to monitor food quality.
11 November 2015
A monolithic optofluidic chip fabricated by femtosecond laser extracts highly metastatic cells from a heterogeneous population on the basis of optical stretching measurements.
27 October 2015
A new tactile sensing device that simultaneously detects thermal and mechanical stimuli could find use in artificial skin systems.
14 October 2015
Michael Liehr: Industry and university collaboration is key element in AIM Photonics