 Numerical lithography approaches in micromanufacturing make it possible to complement or replace test exposures and to optimize mask layouts and illumination systems. 30 January 2012
|
 A silicon-based micromirror array is tested for operation at 92K, and a commercial array for a space evaluation program is presented. 30 January 2012
|
 Measurement uncertainty quantifies performance-related doubt and evaluates the reliability of a direct laser lithography system. 20 January 2012
|
 The cost and availability of these important materials have had their ups and downs. The optics industry is using several strategies to make sure future needs are met. 9 January 2012
|
 Reliably analyzing and modeling transduction processes is key to optimizing piezoelectric energy harvesters as viable alternative power sources to batteries in miniaturized devices. 29 December 2011
|