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Optimizing the quality and manufacture of nanocircuits
Nanoelectronic circuits can be written directly onto oxide semiconductors by tuning the local conductivity with a high-pressure atomic-force-microscope tip.
Understanding laser ablation efficiency
A numerical simulation approach includes optical, thermal, and mechanical sub-models to investigate the mechanism for the pulse duration efficiency dependence.
21 August 2015
3D graphene scaffolds produced by interferometric lithography
Production of 3D graphene scaffolds with micron-scale pores by lithography using UV lasers enables the design of carbon electrodes for advanced electrochemical applications.
25 July 2015
Laser-written 3D crystalline photonic devices
Direct femtosecond laser writing of dielectric crystals enables the fabrication of 3D waveguiding structures as passive or active photonic devices operating from near-UV to mid-IR bands.
24 July 2015
Ultra-low-k material cryoetching plasma process for interconnects
Cryoetching that minimizes plasma-induced carbon depletion was successfully tested on advanced low-k materials used in back-end-of-the-line CMOS technology.
7 July 2015
Mask absorber optimization for enhanced microlithography
A fundamental understanding of 3D photomask-induced phase effects is required to determine the best absorber for particular lithographic purposes.
17 June 2015
More Technical Articles...
Dirk Englund: Developing quantum technologies in scalable semiconductor systems
Laura Waller: Integrating optics and processing in design of imaging systems
Volker Sorger: Plasmonics enables more efficient silicon photonics
Tsu-Jae King Liu plenary talk: Sustaining the Silicon Revolution: From 3D Transistors to 3D Integration
Next phase of Utica nanotechnology initiative launched
Future electronics: Black phosphorus surges ahead of graphene
Speed Record for Light-Emitting Quantum Dots Hints at Faster Computing
Germany Promises 400 Million Boost for Microelectronics
First Transistor Fabricated From Black-Arsenic Phosphorus
More News Headlines...
Outstanding contributions in photonics honored with awards from SPIE
Maryellen Giger of University of Chicago elected SPIE VP
Award to New York-led project of $110 million for manufacturing institute ‘a win’ for the whole photonics community, say SPIE leaders
More SPIE News & Press Releases...
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