SPIE Startup Challenge 2015 Founding Partner - JENOPTIK Get updates from SPIE Newsroom
  • Newsroom Home
  • Astronomy
  • Biomedical Optics & Medical Imaging
  • Defense & Security
  • Electronic Imaging & Signal Processing
  • Illumination & Displays
  • Lasers & Sources
  • Micro/Nano Lithography
  • Nanotechnology
  • Optical Design & Engineering
  • Optoelectronics & Communications
  • Remote Sensing
  • Sensing & Measurement
  • Solar & Alternative Energy
  • Sign up for Newsroom E-Alerts
  • Information for:
SPIE Advanced Lithography 2016|Call for Papers

Journal of Micro/Nanolithography, MEMS, and MOEMS

Celebrate the International Year of Light 2015 with 15% off printed books and proceedings. Shop now.

Micro/Nano Lithography

Visible to IR supercontinuum generation
A novel underetching approach on a dispersion-engineered silicon nitride waveguide has been developed and experimentally verified.
A high-resolution positioning system based on stepper motors can be used to laser etch complex microstructures on optical substrates.
17 September 2015
A numerical simulation approach includes optical, thermal, and mechanical sub-models to investigate the mechanism for the pulse duration efficiency dependence.
21 August 2015
Nanoelectronic circuits can be written directly onto oxide semiconductors by tuning the local conductivity with a high-pressure atomic-force-microscope tip.
18 August 2015
Production of 3D graphene scaffolds with micron-scale pores by lithography using UV lasers enables the design of carbon electrodes for advanced electrochemical applications.
25 July 2015
Direct femtosecond laser writing of dielectric crystals enables the fabrication of 3D waveguiding structures as passive or active photonic devices operating from near-UV to mid-IR bands.
24 July 2015
Dirk Englund: Developing quantum technologies in scalable semiconductor systems