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2015 Photomask Technology | Call for Papers

Celebrate the International Year of Light 2015 with 15% off printed books and proceedings. Shop now.

Journal of Micro/Nanolithography, MEMS, and MOEMS

SPIE PRESS



Micro/Nano Lithography

Fabricating tools for optically actuated microrobotics

Using focused light beams to suspend and autonomously control microscopic tools in 3D enables novel ways to investigate the microscale world.

Laser-induced transfer technology can print very small and delicate objects for applications in nanophotonics and tissue engineering.
30 March 2015
Femtosecond laser microfabrication enables rapid prototyping and development of novel microfluidic platforms with biological applications.
27 March 2015
A dedicated UV nanoimprint lithography system realizes 2D binary subwavelength gratings at optical fiber tips.
12 February 2015
A technique for quickly removing solar cells from their fabrication base, incorporating hydrophilic additives in the lift-off etchant, promises less-expensive, better-performing photovoltaic devices.
5 February 2015
Using multiple colors of visible light for photolithography exposure may ultimately rival the resolution of extreme-UV lithography at a fraction of the cost.
28 January 2015
 
Tsu-Jae King Liu plenary talk: Sustaining the Silicon Revolution -- From 3D Transistors to 3D Integration

CRAIC Technologies

Applied Materials