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2015 Advanced Lithography | Call for Papers

Journal of Micro/Nanolithography, MEMS, and MOEMS

SPIE PRESS



Micro/Nano Lithography

Vectorial resolution enhancement: better fidelity for immersion lithography

Resolution enhancement based on vectorial and multi-parameter co-optimization reduces the complexity and fabrication cost of pixelated masks and sources for lithography.

High-performance photoresists made from metal oxide nanoparticles offer high-sensitivity lithography at extreme-UV wavelengths by using a new ligand-based patterning mechanism.

15 September 2014
Ultraviolet light and nanospherical-lens lithography together fabricate large-area nano-ellipse arrays.
30 July 2014
Helium ion microscopy is able to produce gaps less than 5nm in width and narrow bridges in plasmonic nanostructures.
22 July 2014
A simple and low-cost direct laser writing technique using an ultralow linear absorption process enables production of specific 2D and 3D sub-microstructures.
9 July 2014
Nanofabrication improves the sensitivity of a 33Mpixel 120fps CMOS image sensor by increasing the conversion gain from electron charge to signal voltage.
3 June 2014
 
Armin Knoll: 3D nanofabrication using heatable probes