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2015 Photomask Technology | Call for Papers

Journal of Micro/Nanolithography, MEMS, and MOEMS

SPIE PRESS



Micro/Nano Lithography

Fabricating tools for optically actuated microrobotics

Using focused light beams to suspend and autonomously control microscopic tools in 3D enables novel ways to investigate the microscale world.

Femtosecond laser microfabrication enables rapid prototyping and development of novel microfluidic platforms with biological applications.
27 March 2015
A dedicated UV nanoimprint lithography system realizes 2D binary subwavelength gratings at optical fiber tips.
12 February 2015
A technique for quickly removing solar cells from their fabrication base, incorporating hydrophilic additives in the lift-off etchant, promises less-expensive, better-performing photovoltaic devices.
5 February 2015
Using multiple colors of visible light for photolithography exposure may ultimately rival the resolution of extreme-UV lithography at a fraction of the cost.
28 January 2015
On-chip terabit-scale digital signal transmission and low-distortion analog signal transmission can be achieved with favorable performance using ultra-compact silicon photonic devices.
12 January 2015
 
Tsu-Jae King Liu plenary talk: Sustaining the Silicon Revolution -- From 3D Transistors to 3D Integration

Applied Materials

Ross Optical Industries