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2015 Advanced Lithography | Call for Papers

2014 Photomask Technology | Register Today

Journal of Micro/Nanolithography, MEMS, and MOEMS

SPIE PRESS



Micro/Nano Lithography

Helium ion beam milling for plasmonic nanoantennas
Helium ion microscopy is able to produce gaps less than 5nm in width and narrow bridges in plasmonic nanostructures.
Ultraviolet light and nanospherical-lens lithography together fabricate large-area nano-ellipse arrays.
30 July 2014
A simple and low-cost direct laser writing technique using an ultralow linear absorption process enables production of specific 2D and 3D sub-microstructures.
9 July 2014
Nanofabrication improves the sensitivity of a 33Mpixel 120fps CMOS image sensor by increasing the conversion gain from electron charge to signal voltage.
3 June 2014

Grouping laser pulses in tightly bunched ‘bursts’ can significantly increase material removal rates for micromachining.

9 May 2014
Combining several types of lithography enables fabrication of x-ray diffractive optical elements with high aspect ratio and high fidelity.
22 April 2014
 
Armin Knoll: 3D nanofabrication using heatable probes