Silicon metasurfaces: a novel platform for deep-UV plasmonics and surface-enhanced spectroscopy (Invited Paper)

We showcase plasmonic metasurfaces employing silicon (Si) nanostructures tailored for deep ultraviolet (DUV) spectroscopy. Si exhibits plasmonic resonance owing to the photon-doping effect originating from interband transitions in the DUV range. Through careful design adjustments, our metasurface achieves strong field enhancement at ~260nm. We investigate potential applications of the reported Si void metasurfaces for surface-enhanced spectroscopy by leveraging the unique properties of our Si metasurface. This study expands the range of materials employed in DUV nanophotonics, unlocking opportunities across diverse fields such as biomedical analysis and nonlinear optics.