Paper 13111-49
Paper 13111-49
Plasmonic nano-disks arrays made with EBL using the dots-on-the-fly method
21 August 2024 • 2:25 PM - 2:40 PM PDT | Conv. Ctr. Room 4
Abstract
Fabrication of large arrays with traditional electron beam lithography techniques is cumbersome during pattern design, usually leads to large data files and easily results in system memory overload. In Dots-on-the-fly patterning, instead of specifying the locations of individual spots, a boundary for the array is given and the spacing between spots within the boundary is specified by the beam step size. A designed pattern element thus becomes a container object, with beam spacing acting as a parameterized location list for an array of spots confined by that container.
Presenter
U.S. Naval Research Lab. (United States)
MARC CHRISTOPHERSEN joined NRL 2007 as a NRC (National Research Council) postdoctoral fellow. Since 2009 he is a federal employee in the Radiation Detection section of the High Energy Space Environment Branch in the Space Science Division. Marc Christophersen worked on different MEMS (micro-electromechanical systems) applications, ranging from electrochemistry to biomedical applications. His current research interests are focused on the development of silicon radiation detectors and low-level light sensors for high-energy physics experiments and DoD/home land security applications. He received his Ph.D. and M.S. in materials science from the University in Kiel in Germany. He received the 2011 US Navy Dr. Delores Etter Top Scientist and Engineers of the Year and 2012 NRL Sigma Xi Edison Chapter Young Investigator awards.