Advanced high-resolution switchable metasurfaces for high-resolution spatial light modulators (Invited Paper)

High-resolution spatial light modulators are key elements in augmented and virtual reality systems, as well as in advanced LIDAR and angle-dependent sensors as well as advanced imaging systems. Hybrid devices containing liquid crystals, polymers, in combination with plasmonic or dielectric nanoantennas are state of the art. We pursue a different avenue which utilizes conductive polymers, consisting of PEDOT:PSS nanoantennas, who undergo a metal-to-insulator phase transition upon electrical switching in CMOS compatible voltage ranges. In order to reach the required spatial resolution for holograms with high fields of view, we directly pattern PEDOT:PSS by electron beam lithography. This way, 250 nm line widths in metasurface structures have been obtained. By using planar technologies, high-resolution active PEDOT metasurface switching is also attainable. Finally, we are going to demonstrate switching of optical metasurface resonances by a metal-to-insulator transition in inorganic materials.