Program now available!
Register now
>
23 - 27 February 2025
San Jose, California, US
SPIE Advanced Lithography + Patterning in San Jose, California SPIE Advanced Lithography + Patterning in San Jose, California

SPIE Advanced Lithography + Patterning

The event for emerging technology in the semiconductor industry

Attend to hear research, challenges, and breakthroughs as you gather with colleagues in San Jose

Join other leading researchers who are solving challenges in optical and EUV lithography, patterning technologies, metrology, and process integration for semiconductor manufacturing and adjacent applications.
#SPIElitho Twitter logo Facebook logo Instagram logo Youtube logo Linkedin logo

Notable speakers from around the globe: meet the plenary speakers

Explore six great conferences

  • Optical and EUV Nanolithography
  • DTCO and Computational Patterning
  • Metrology, Inspection, and Process Control
  • Novel Patterning Technologies
  • Advances in Patterning Materials and Processes
  • Advanced Etch Technology and Process Integration for Nanopatterning

Five days of exciting content and connecting with your community

  • Plenary talks
  • Technical presentations
  • Networking sessions
  • Course offerings
  • Exhibition

Presenter at SPIE Advanced Lithography + Patterning

Add a course to your conference experience

Choose from a selection of highly valuable topics

Advance your career and expand your skill set with instructional opportunities. Several courses will be available in San Jose.

Attendees of SPIE Advanced Lithography + Patterning take a course

Exhibition at Advanced Lithography + Patterning

Connect with the semiconductor community

The exhibition at Advanced Lithography + Patterning is where people gather to collaborate and get business done. Find these technology solutions and more:
• Photoresist, EUV, and other specialty materials
• E-beam lithography systems
• Precision cleaning, contamination, transport support materials
• Wafer treatments and substrates

Attendees of SPIE Advanced Lithography

Opportunities for students

Students: Learn how to attend this event for free

SPIE Advanced Lithography + Patterning offers numerous opportunities for students to engage with and learn about the semiconductor industry, as well as share their latest research in lithography and photomask technologies. Leading companies support student participation through grants and awards, and tech groups offer scholarships for graduate and undergraduate applicants.

Student authors at SPIE Advanced Lithography + Patterning meet and network

Stay involved

Mail icon: Sign up for emails to stay informed about SPIE Advanced Lithography + Patterning Sign up for emails Sign up for emails ...
Phone icon: Find the SPIE app that keeps you connected to Advanced Lithography + Patterning Get the conference app Get the conference app ...