Inductance-to- digital Converters (LDC) based differential inductive displacement sensors with frequency output

Inductance-to- Digital Converters (LDC) based differential inductive displacement Sensors with frequency output Xiaolong Lu , Zongwen Wang ,You Wang ,Guiyun Tian, Dehua Yang and Yong Zhang 1 School of Mechanical Engineering, Sichuan University, Chengdu 610065, China 2 School of Engineering, Newcastle University, Newcastle upon Tyne NE1 7RU, UK 3 Nanjing Institute of Astronomical Optics & Technology, Chinese Academy of Sciences, Nanjing 210042, China; 4 CAS Key Laboratory of Astronomical Optics & Technology, Nanjing Institute of Astronomical Optics & Technology, Nanjing 210042,China Abstract: An edge displacement sensor is one of the most key technologies for building segmented mirror telescopes. Traditional edge displacement sensors mainly use Analog-to-Digital converter (ADC) interfaces, and its signal conditioning circuit is complex and high power consumption, which is not conductive to the digital transformation and the Internet of Things (IoT) in particular. This article proposes a frequency output sensor based on Inductive-to Digital Converter (LDC) , which is low-cost, high sensitivity, high stability and consists of a differential structure. The time drift and temperature