Plenary Event
Welcome and Monday Plenary
27 February 2023 • 8:00 AM - 10:00 AM PST | Convention Center, Ballroom 220A
8:00 AM:
Symposium Welcome and Opening Remarks
Kafai Lai, University of Hong Kong (United States) and Qinghuang Lin, LAM Research Corp. (United States)
8:05 AM:
Introduction of New SPIE Fellows
8:15 AM:
2023 SPIE Rudolf and Hilda Kingslake Award in Optical Design
Presented in recognition of significant achievement in the field of optical design, including the theoretical or experimental aspects of optical engineering.
Wilhelm Ulrich, recently retired head of optics research and design at Zeiss Optics, is the 2023 recipient of the SPIE Rudolf and Hilda Kingslake Award in Optical Design in recognition of decades of transformative design solutions across a broad range of optical products, including lithographic optical systems and optical designs for photographic lenses, microscopy objectives, medical-imaging instrumentation, laser optics, metrology systems, and infrared optics.
8:25 AM:
2023 SPIE Frits Zernike Award for Microlithography
Presented in recognition of outstanding accomplishments in microlithographic technology, especially those furthering the development of semiconductor lithographic imaging solutions.
Anthony Yen, Vice President and Head of Technology Development Center at ASML, is the 2023 recipient of the SPIE Frits Zernike Award for Microlithography in recognition of his pioneering work across optical physics, nanopatterning, and EUV lithography.
8:35 AM:
Presentation of the Nick Cobb Memorial Scholarship
The Nick Cobb Memorial Scholarship is awarded to an outstanding graduate student studying advanced lithography or a related field. The scholarship is jointly funded by Siemens EDA and SPIE.
8:40 AM to 10:00 AM
Plenary Presentations
Sponsored by:
8:40 AM - 9:20 AM
Driving Moore’s Law into the next decade
Martin van den Brink, ASML Netherlands B.V. (Netherlands)
Martin van den Brink has been the President and Chief Technology Officer of ASML Holding NV since July 1, 2013. Mr. van den Brink served as the Chief Product & Technology Officer and Executive Vice President of ASML Holding NV until July 1, 2013. He served as the Executive Vice President of Marketing and Technology of ASML Holding NV since 1999 and has been its Member of the Board of Management since July 1999. Before then, he served as Vice President Technology since 1995. He joined ASML when it was founded in early 1984. He has held several positions in engineering and had prime responsibility for developing the PAS 5500 platform in the early 90s, which today represents the largest installed base at ASML's customers. Mr. van den Brink received a degree in Electrical Engineering and a degree in Physics in 1984 from the University of Twente in the Netherlands.
9:20 AM - 10:00AM
Update on CHIPS Act implementation
Laurie Locascio, National Institute of Standards and Technology (United States)
In August 2022, President Joe Biden signed into law the CHIPS and Science Act. The CHIPS Act established a CHIPS for America Fund, totaling approximately $50 billion, for the U.S. Department of Commerce to administer to strengthen semiconductor manufacturing in America, where the integrated circuit was first invented. In addition to the construction of new fabs, CHIPS for America addresses the need for a resilient domestic microelectronics supply chain of materials and equipment suppliers, and a workforce trained for a range of technical capabilities. This talk will provide details about the rapidly developing CHIPS for America program, including the Research and Development Office, along with updates and some examples to illustrate the CHIPS vision for interaction with the semiconductor community.
Laurie Locascio is the 17th director of NIST and the fourth Under Secretary of Commerce for Standards and Technology. In this role, she provides high-level oversight and direction of NIST. Dr. Locascio most recently served as vice president for research at the University of Maryland College Park and University of Maryland Baltimore, where she focused on the development of large interdisciplinary research programs, technology commercialization, innovation and economic development efforts, and strategic partnerships with industry, federal, academic and nonprofit collaborators. She also served as a professor in the Fischell Department of Bioengineering at the A. James Clark School of Engineering with a secondary appointment in the Department of Pharmacology in the School of Medicine.
Before joining the University of Maryland, Dr. Locascio worked at NIST for 31 years, rising from a research biomedical engineer to eventually leading the agency’s Material Measurement Laboratory (MML). She also served as the acting associate director for laboratory programs, the No. 2 position at NIST, providing direction and operational guidance for NIST’s lab research programs. As director of MML, one of NIST’s largest scientific labs, Dr. Locascio oversaw 1,000 research staff in eight locations around the United States and a $175 million annual budget and recruited top talent, fostered excellence, and built a collegial and collaborative workplace. She implemented strategic partnerships with universities, industry and other government labs, including a partnership with the University of Maryland’s Institute for Bioscience and Biotechnology Research at the Universities at Shady Grove. Before that, Dr. Locascio served as chief of MML’s Biochemical Sciences Division.
Dr. Locascio’s most recent honors and awards include the 2021 induction as a fellow of the National Academy of Inventors, the 2017 American Chemical Society Earle B. Barnes Award for Leadership in Chemical Research Management, and the 2017 Washington Academy of Sciences Special Award in Scientific Leadership. She has published 115 scientific papers and has received 12 patents in the fields of bioengineering and analytical chemistry. Her honors and awards also include the Department of Commerce Silver and Bronze Medal Awards, the American Chemical Society Division of Analytical Chemistry Arthur F. Findeis Award, the NIST Safety Award and the NIST Applied Research Award. She is also a fellow of the American Chemical Society and the American Institute for Medical and Biological Engineering. Dr. Locascio has a B.S. in chemistry from James Madison University, an M.S. in bioengineering from the University of Utah, and a Ph.D. in toxicology from the University of Maryland Baltimore.
Symposium Welcome and Opening Remarks
Kafai Lai, University of Hong Kong (United States) and Qinghuang Lin, LAM Research Corp. (United States)
8:05 AM:
Introduction of New SPIE Fellows
8:15 AM:
2023 SPIE Rudolf and Hilda Kingslake Award in Optical Design
Presented in recognition of significant achievement in the field of optical design, including the theoretical or experimental aspects of optical engineering.
Wilhelm Ulrich, recently retired head of optics research and design at Zeiss Optics, is the 2023 recipient of the SPIE Rudolf and Hilda Kingslake Award in Optical Design in recognition of decades of transformative design solutions across a broad range of optical products, including lithographic optical systems and optical designs for photographic lenses, microscopy objectives, medical-imaging instrumentation, laser optics, metrology systems, and infrared optics.
8:25 AM:
2023 SPIE Frits Zernike Award for Microlithography
Presented in recognition of outstanding accomplishments in microlithographic technology, especially those furthering the development of semiconductor lithographic imaging solutions.
Anthony Yen, Vice President and Head of Technology Development Center at ASML, is the 2023 recipient of the SPIE Frits Zernike Award for Microlithography in recognition of his pioneering work across optical physics, nanopatterning, and EUV lithography.
8:35 AM:
Presentation of the Nick Cobb Memorial Scholarship
The Nick Cobb Memorial Scholarship is awarded to an outstanding graduate student studying advanced lithography or a related field. The scholarship is jointly funded by Siemens EDA and SPIE.
8:40 AM to 10:00 AM
Plenary Presentations
Sponsored by:
8:40 AM - 9:20 AM
Driving Moore’s Law into the next decade
Martin van den Brink, ASML Netherlands B.V. (Netherlands)
Martin van den Brink has been the President and Chief Technology Officer of ASML Holding NV since July 1, 2013. Mr. van den Brink served as the Chief Product & Technology Officer and Executive Vice President of ASML Holding NV until July 1, 2013. He served as the Executive Vice President of Marketing and Technology of ASML Holding NV since 1999 and has been its Member of the Board of Management since July 1999. Before then, he served as Vice President Technology since 1995. He joined ASML when it was founded in early 1984. He has held several positions in engineering and had prime responsibility for developing the PAS 5500 platform in the early 90s, which today represents the largest installed base at ASML's customers. Mr. van den Brink received a degree in Electrical Engineering and a degree in Physics in 1984 from the University of Twente in the Netherlands.
9:20 AM - 10:00AM
Update on CHIPS Act implementation
Laurie Locascio, National Institute of Standards and Technology (United States)
In August 2022, President Joe Biden signed into law the CHIPS and Science Act. The CHIPS Act established a CHIPS for America Fund, totaling approximately $50 billion, for the U.S. Department of Commerce to administer to strengthen semiconductor manufacturing in America, where the integrated circuit was first invented. In addition to the construction of new fabs, CHIPS for America addresses the need for a resilient domestic microelectronics supply chain of materials and equipment suppliers, and a workforce trained for a range of technical capabilities. This talk will provide details about the rapidly developing CHIPS for America program, including the Research and Development Office, along with updates and some examples to illustrate the CHIPS vision for interaction with the semiconductor community.
Laurie Locascio is the 17th director of NIST and the fourth Under Secretary of Commerce for Standards and Technology. In this role, she provides high-level oversight and direction of NIST. Dr. Locascio most recently served as vice president for research at the University of Maryland College Park and University of Maryland Baltimore, where she focused on the development of large interdisciplinary research programs, technology commercialization, innovation and economic development efforts, and strategic partnerships with industry, federal, academic and nonprofit collaborators. She also served as a professor in the Fischell Department of Bioengineering at the A. James Clark School of Engineering with a secondary appointment in the Department of Pharmacology in the School of Medicine.
Before joining the University of Maryland, Dr. Locascio worked at NIST for 31 years, rising from a research biomedical engineer to eventually leading the agency’s Material Measurement Laboratory (MML). She also served as the acting associate director for laboratory programs, the No. 2 position at NIST, providing direction and operational guidance for NIST’s lab research programs. As director of MML, one of NIST’s largest scientific labs, Dr. Locascio oversaw 1,000 research staff in eight locations around the United States and a $175 million annual budget and recruited top talent, fostered excellence, and built a collegial and collaborative workplace. She implemented strategic partnerships with universities, industry and other government labs, including a partnership with the University of Maryland’s Institute for Bioscience and Biotechnology Research at the Universities at Shady Grove. Before that, Dr. Locascio served as chief of MML’s Biochemical Sciences Division.
Dr. Locascio’s most recent honors and awards include the 2021 induction as a fellow of the National Academy of Inventors, the 2017 American Chemical Society Earle B. Barnes Award for Leadership in Chemical Research Management, and the 2017 Washington Academy of Sciences Special Award in Scientific Leadership. She has published 115 scientific papers and has received 12 patents in the fields of bioengineering and analytical chemistry. Her honors and awards also include the Department of Commerce Silver and Bronze Medal Awards, the American Chemical Society Division of Analytical Chemistry Arthur F. Findeis Award, the NIST Safety Award and the NIST Applied Research Award. She is also a fellow of the American Chemical Society and the American Institute for Medical and Biological Engineering. Dr. Locascio has a B.S. in chemistry from James Madison University, an M.S. in bioengineering from the University of Utah, and a Ph.D. in toxicology from the University of Maryland Baltimore.