Paper 13134-32
Paper 13134-32
Study on the new characteristics of optical system surface finishing using gas cluster ion beam
22 August 2024 • 11:20 AM - 11:40 AM PDT | Conv. Ctr. Room 11A
Abstract
This study explores a novel approach for optical system surface finish using Gas Cluster Ion Beam (GCIB).
Presenter
Myoung Choul Choi
Ctr. for Scientific Instrumentation, Korea Basic Science Institute (Korea, Republic of)
Myoung Choul Choi is a principal researcher in the Division of R&D Equipment Industry Center for Scientific Instrumentation of Korea Basic Scientific Institute (KBSI). He received his Ph.D. in physics from Kwangwoon University in 2001. From 2005 to now, he has developed and applied various analysis equipment for biosamples and organic material analysis, such as FTICR MS, MALDI TOF MS, and TOF-SIMS. Recently, cluster ion guns for surface analysis have been developed, and various application studies are being conducted.