Paper 13134-31
Paper 13134-31
Key aspects of a sub-nanometer level deterministic ion beam figuring process (Invited Paper)
22 August 2024 • 10:50 AM - 11:20 AM PDT | Conv. Ctr. Room 11A
Abstract
This presentation delves into the key aspects of achieving sub-nanometer level deterministic ion beam figuring (IBF) of optical surfaces. Five aspects, including metrology, dwell time optimization, velocity scheduling, positioning, and final inspection, are discussed. Our solutions for the challenges in each aspect are highlighted.
Presenter
Brookhaven National Lab. (United States)
Dr Tianyi Wang is an associate physicist at the National Synchrotron Light Source II, Brookhaven National Laboratory. He obtained his PhD degree in high-performance optical measurement techniques from Nanyang Technological University, Singapore, in 2018. He is doing R&D in sub-nanometer synchrotron X-ray mirror metrology and fabrication technologies.