Research on high-precision calibration device for dual-axis tilt sensor

A dual-axis numerical control rotary table is designed in this article to calibrate a dual-axis tilt sensor. The device comprises a swing axis and a rotating axis, which are used to produce tilts in two perpendicular directions. To achieve precise control of the motion mechanism and enhance positioning accuracy, the time-grating angular displacement sensors have been adopted as the feedback and measurement components in both axes of the device. The experimental results indicate that the error of the swing axis of this calibration device is ±1.5 arcsec, while the error of the rotation axis is ±1.0 arcsec, with a repeatability of less than 0.5 arcsec, which is suitable for the calibration of the majority of dual-axis tilt sensors.