Lobster eye x-ray optics fabricated with MEMS technologies

Lobster eye optics are expected as to be a wide-field telescope and are suitable for future X-ray sky surveys and monitoring missions. The ultra-lightweight X-ray optics have been developed using MEMS technologies and the same way can be applied to the fabrication of lobster eye optics. A large number of slits with 20 micro-meters width were formed by an etching process in a 4-inch Si wafer with 300 micro-meters thickness. To collect X-rays on a focal plane, the wafer was plastic-deformed into a spherical shape with a radius of curvature of 1000 mm. Two deformed wafers were assembled in such a way as to arrange the slits of each wafer orthogonally. Then, samples of lobster eye optics were completed and the fabrication process flow with MEMS technologies can be confirmed.