### PROCEEDINGS VOLUME 5879

Recent Developments in Traceable Dimensional Measurements III*This item is only available on the SPIE Digital Library.

Volume Details

Volume Number: 5879

Date Published: 18 August 2005

Date Published: 18 August 2005

Table of Contents

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Accurate extraction of thermal expansion coefficients and their uncertainties from high precision interferometric length measurements

Author(s): R. Schoedel

Author(s): R. Schoedel

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Nanometrology and high-precision temperature measurements under varying in time temperature conditions

Author(s): Alexandre Titov; Igor Malinovsky

Author(s): Alexandre Titov; Igor Malinovsky

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Uncertainty evaluation of a fiber-based interferometer for the measurement of absolute dimensions

Author(s): Vivek G. Badami; Todd Blalock

Author(s): Vivek G. Badami; Todd Blalock

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Precise certification of the temperature measuring system of the original Koesters interferometer and ways of its improvement

Author(s): Alexander Titov; Igor Malinovsky; Madlen Erin; Hakima Belaidi; Ricardo dos Santos Franca

Author(s): Alexander Titov; Igor Malinovsky; Madlen Erin; Hakima Belaidi; Ricardo dos Santos Franca

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Automatic measurement of gauge blocks by Fourier transforming the scanned interferograms

Author(s): Chu-Shik Kang; Jae Wan Kim; Ho Suhng Suh; Won-Kyu Lee

Author(s): Chu-Shik Kang; Jae Wan Kim; Ho Suhng Suh; Won-Kyu Lee

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The effect of phase change on reflection on optical measurements

Author(s): Kate M. Medicus; Anneliese Fricke; John Edward Brodziak Jr.; Angela D. Davies

Author(s): Kate M. Medicus; Anneliese Fricke; John Edward Brodziak Jr.; Angela D. Davies

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On the influence of gauge block roughness characteristic and surface treatment on length calibration by optical interferometry

Author(s): Jennifer E. Decker; Peter Franke; Gerhard Boensch

Author(s): Jennifer E. Decker; Peter Franke; Gerhard Boensch

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Characterising the performance of the PTB line scale interferometer by measuring photoelectric incremental encoders

Author(s): Rainer Koening; Jens Fluegge; Harald Bosse

Author(s): Rainer Koening; Jens Fluegge; Harald Bosse

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Systematic bias compensation for a moire fringe projection system

Author(s): D. Purcell; A. Samara; A. Davies; F. Farahi

Author(s): D. Purcell; A. Samara; A. Davies; F. Farahi

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Gaussian beam modeling of the radius of curvature

Author(s): Kate M. Medicus; James Snyder; Angela D. Davies

Author(s): Kate M. Medicus; James Snyder; Angela D. Davies

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Radius case study: optical bench measurement and uncertainty including stage error motions

Author(s): Tony L. Schmitz; Neil Gardner; Matthew Vaughn; Angela Davies

Author(s): Tony L. Schmitz; Neil Gardner; Matthew Vaughn; Angela Davies

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Bootstrap calibration of an autocollimator, index table and sine bar ensemble for angle metrology

Author(s): James R. Pekelsky; Lorne E. Munro

Author(s): James R. Pekelsky; Lorne E. Munro

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Dynamic range enhancing technique for form, waviness and roughness measurements using fringe projection

Author(s): Ayman Samara; Faramarz Farahi; Angela Davies

Author(s): Ayman Samara; Faramarz Farahi; Angela Davies

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Size effects on stylus tip reconstruction for micro and nano roughness measurement

Author(s): Chao-Chang A. Chen; Jr-Rung Chen; Huay-Chung Liou; Yen-Liang Chen

Author(s): Chao-Chang A. Chen; Jr-Rung Chen; Huay-Chung Liou; Yen-Liang Chen

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Accurate roughness measurements by laser interferometer calibration, VFM-uncertainty calculations and noise reduction

Author(s): H. Haitjema; M. A. A. Morel

Author(s): H. Haitjema; M. A. A. Morel

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Use of monochromatic phase data for improved profile measurement in spectrally resolved white light interferometry

Author(s): S. K. Debnath; D. K. Sharma; M. P. Kothiyal

Author(s): S. K. Debnath; D. K. Sharma; M. P. Kothiyal

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Multi-purpose extrinsic Fabry-Perot sensor with miniature dual fiber configuration

Author(s): Jung-Tsung Chou; Chiung-Huei Huang; Ching-Ming Yeh; Calvin C. Chang; Hung-Ming Tai

Author(s): Jung-Tsung Chou; Chiung-Huei Huang; Ching-Ming Yeh; Calvin C. Chang; Hung-Ming Tai

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Absolute distance metrology with frequency sweeping interferometry

Author(s): Alexandre Cabral; Jose Rebordao

Author(s): Alexandre Cabral; Jose Rebordao

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The detection of cyclic nonlinearities in a ZMI2000 heterodyne interferometer

Author(s): Jorrit Thijsse; Asa K. Jamting; Nick Brown; Han Haitjema

Author(s): Jorrit Thijsse; Asa K. Jamting; Nick Brown; Han Haitjema

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Absolute distance metrology for space interferometers

Author(s): Bas L. Swinkels; Abdelhalim Latoui; Nandini Bhattacharya; Arno A. Wielders; Joseph J. M. Braat

Author(s): Bas L. Swinkels; Abdelhalim Latoui; Nandini Bhattacharya; Arno A. Wielders; Joseph J. M. Braat

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Linear Canonical Transforms, and Speckle Based Metrology

Author(s): Damien P. Kelly; Robert F. Patten; Bryan M. Hennelly; Ying Liu; Jennifer E. Ward; John T. Sheridan

Author(s): Damien P. Kelly; Robert F. Patten; Bryan M. Hennelly; Ying Liu; Jennifer E. Ward; John T. Sheridan

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Network compensation of optical metrology for satellite formation flying

Author(s): Paulo Jorge Motrena; Jose Manuel Rebordao; Alexandre Pereira Cabral

Author(s): Paulo Jorge Motrena; Jose Manuel Rebordao; Alexandre Pereira Cabral

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Performance assessment of involute gear measurement by CMM using a double-ball artifact

Author(s): Toshiyuki Takatsuji; Koshi Kondo; Aizo Kubo; Frank Haertig; Sonko Osawa; Kazuya Naoi; Tomizo Kurosawa; Masaharu Komori

Author(s): Toshiyuki Takatsuji; Koshi Kondo; Aizo Kubo; Frank Haertig; Sonko Osawa; Kazuya Naoi; Tomizo Kurosawa; Masaharu Komori

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A fiber probe for CMM measurements of small features

Author(s): Jack A. Stone; Bala Muralikrishnan; John R. Stoup

Author(s): Jack A. Stone; Bala Muralikrishnan; John R. Stoup

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Ultra precision micro-CMM using a low force 3D touch probe

Author(s): F. Meli; A. Kueng; R. Thalmann

Author(s): F. Meli; A. Kueng; R. Thalmann

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Design and calibration of an elastically guided CMM axis with nanometer repeatability

Author(s): J. K. van Seggelen; P. C.J.N. Rosielle; P. H. J. Schellekens; H. A.M. Spaan; R. H. Bergmans; G. J. W. L. Kotte

Author(s): J. K. van Seggelen; P. C.J.N. Rosielle; P. H. J. Schellekens; H. A.M. Spaan; R. H. Bergmans; G. J. W. L. Kotte

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First domestic comparison of ball plate calibration in Japan

Author(s): Sonko Osawa; Toshiyuki Takatsuji; Tomizo Kurosawa

Author(s): Sonko Osawa; Toshiyuki Takatsuji; Tomizo Kurosawa

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Methods for evaluating the reference value in laboratory intercomparisons of dimensional measurements

Author(s): Jack A. Stone

Author(s): Jack A. Stone

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Phase-shifting laser diode interferometry with equal phase steps using a Fabry-Perot cavity

Author(s): Youichi Bitou; Hajime Inaba; Feng-Lei Hong; Toshiyuki Takatsuji; Atsushi Onae

Author(s): Youichi Bitou; Hajime Inaba; Feng-Lei Hong; Toshiyuki Takatsuji; Atsushi Onae

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Calibration of two-dimensional nanometer gratings using optical diffractometer and metrological atomic force microscope

Author(s): Jong-Ahn Kim; Jae Wan Kim; Byong Chon Park; Tae Bong Eom; Chu-Shik Kang

Author(s): Jong-Ahn Kim; Jae Wan Kim; Byong Chon Park; Tae Bong Eom; Chu-Shik Kang

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A comparison study on the measurement of nanoparticles

Author(s): Chen-Yu Wang; Shan-Peng Pan; Gwo-Sheng Peng; Jen-Hui Tsai

Author(s): Chen-Yu Wang; Shan-Peng Pan; Gwo-Sheng Peng; Jen-Hui Tsai

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A novel Michelson interferometer combined with an autocollimator for the simultaneous measurement of linear and angular displacement

Author(s): Jae Wan Kim; Jong-Ahn Kim; Chu-Shik Kang; Tae Bong Eom

Author(s): Jae Wan Kim; Jong-Ahn Kim; Chu-Shik Kang; Tae Bong Eom

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Development of a two-dimensional nano-displacement measuring system utilizing a combined optical and x-ray interferometer

Author(s): Jinwon Park; Jaegeun Jo; Sangho Byun; Cheon Il Eom

Author(s): Jinwon Park; Jaegeun Jo; Sangho Byun; Cheon Il Eom

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A new approach of surface roughness measurement using optical method and image processing

Author(s): K. P. Chaudhary; R. P. Singhal; Shashi K. Singh; Chandera Shakher

Author(s): K. P. Chaudhary; R. P. Singhal; Shashi K. Singh; Chandera Shakher

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