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Microsystems Metrology and Inspection
Editor(s): Christophe Gorecki

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Volume Details

Volume Number: 3825
Date Published: 15 September 1999

Table of Contents
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Role of interfacial properties on MEMS performance and reliability
Author(s): Maarten P. de Boer; J. A. Knapp; Thomas M. Mayer; Terry A. Michalske
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Wafer level inspection for determination of yield of surface-micromachined pressure sensors
Author(s): Martin Hill; Helen Berney; Bill Lane; Eamon Hynes
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Investigation of heat transfer in micromirrors
Author(s): Kersten Kehr; Steffen Kurth; Jan Mehner; Wolfram Doetzel; Thomas Gessner
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Novel optical sensors fabricated by Si micromachining
Author(s): Minoru Sasaki
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Preparation of oxinitride optical waveguides with piezoelectric modulation fabricated by silicon micromachining
Author(s): Christophe Gorecki
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Bondability of processed glass wafers
Author(s): Gregory Pandraud; Cheng-Qun Gui; Florent Pigeon; Paul V. Lambeck; Olivier M. Parriaux
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Shape memory alloys for micromembrane actuation
Author(s): Patrick Surbled; Bruno Le Pioufle; E. H. Yang; Hiroyuki Fujita
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Vibration measurement of microstructures by means of laser-optical modal analysis
Author(s): Rene Schnitzer; Norbert Ruemmler; Volker Grosser; Bernd Michel
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Controlling diode laser bar temperature by micro channel liquid cooling
Author(s): Katrin Unger; Dietmar Mueller; Dirk Lorenzen; Franz X. Daiminger
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Fiber optic probe for in-situ inspection of surface cracks in steam generator tubes
Author(s): Jose Carlos Lopez Vazquez; Angel F. Doval; Benito Vasquez Dorrio; J. Bugarin; Jose M. Alen; J. L. Fernandez; Mariano Perez-Amor; Benjamin Gonzalez Tejedor
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Real-time optical metrology for microsystem fabrication
Author(s): Peter Seitz
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NanoWalker: a fully autonomous highly integrated miniature robot for nanoscale measurements
Author(s): Sylvain M. Martel; Peter Geoffrey Madden; Luke Sosnowski; Ian Warwick Hunter; Serge Lafontaine
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Versatile microscopic profilometer-vibrometer for static and dynamic characterization of micromechanical devices
Author(s): Alain Bosseboeuf; Jean Paul Gilles; Kamran Danaie; Reda Yahiaoui; Michel Dupeux; Jean Pierre Puissant; Alain Chabrier; Francoise Fort; Philippe Coste
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Generation of thin film micro-optics by crossed deposition through wire-grid masks
Author(s): Uwe Griebner; Ruediger Grunwald
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Inspection of microsystems with a laser scanning microscope
Author(s): Gerd Dussler; B. Broecher; Tilo Pfeifer
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Qualification of optical measurement techniques for the investigation of material parameters of microcomponents
Author(s): Wolfgang Osten; Werner P. O. Jueptner; Soenke Seebacher; Torsten Baumbach
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Testing microcomponents by speckle interferometry
Author(s): Petra Aswendt; Roland Hoefling; Karla Hiller
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Digital speckle-metrology local investigations of sedimentation and surface effects in liquids
Author(s): Ilia Roussev; Todor Partalin; Evtim Toshev; Assen Choulev; Pavel I. Koulev
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