Goldberg, Kenneth A.

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Dr. Kenneth A. Goldberg

Staff Physicist
Lawrence Berkeley National Lab.
Regular Member

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Area of Expertise: EUV optics, microscopy, x-ray optics, interferometry, photomasks, optical modeling
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Summary
Dr. Kenneth Goldberg is an optical physicist developing advanced beamlines and optical systems for high-coherent-flux, x-ray beamlines, with diffraction limited performance. Dr. Goldberg now serves on the team developing experimental systems for the Advanced Light Source Upgrade project at Lawrence Berkeley National Laboratory. The project is developing new and upgraded beamlines for coherent soft x-ray and tender x-ray science.

He is formerly the Deputy Directory of LBNL's Center for X-Ray Optics, and the Principal Investigator of the SHARP EUV mask-imaging microscope, and the Actinic Inspection Tool (AIT), and was a co-creator of the SEMATECH Berkeley Micro-Exposure Tool (MET).

Dr. Goldberg specializes in the development of short-wavelength optical technologies for including mirrors and novel diffractive optics, including zone plates, photolithography instrumentation, beam diagnostics and mask imaging. He has a career-long obsession with wavefront-measuring interferometry.

Dr. Goldberg received an A.B. degree in Physics and Applied Math, and a Ph.D. in Physics from the University of California, Berkeley. He has authored and co-authored over 300 publications, and has received 13 patents. Dr. Goldberg served as chairman of the Advanced Light Source Users Executive Committee (ALS UEC) in 2009, representing a community of over 2000 synchrotron users. He was the Experimental Systems program chair of the 6th International Workshop of Diffraction-Limited Storage Rings. He served four years as chair and co-chair of the SPIE Advanced Lithography's EUV Lithography conference.
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