Dr. Harsha Grunes

Senior Member | Senior Principal Engineer at Intel Corp.
Grunes, Harsha
SPIE Leadership: Retrieving Data, please wait...
SPIE Membership: 7.4 years
SPIE Awards: Senior status
SPIE Involvement: Retrieving Data, please wait...
Area of Expertise: Photolithography, RET - Resolution Enhancement Techniques, OPC - Optical Proximity Correction, Photomasks
Contact Details:
Sign In to send a private message or view contact details

Upcoming Presentations

Most Recent | Show All
Retrieving Data, please wait...

Publications

Most Recent | Show All
Retrieving Data, please wait...

Conference Committee Involvement

Most Recent | Show All
Retrieving Data, please wait...

Course Instructor

Most Recent | Show All
Retrieving Data, please wait...
PREMIUM CONTENT
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Create an SPIE account