Dr. Damien Carau

PhD / Engineer at ESRF - The European Synchrotron
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SPIE Membership: 1.0 years
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Area of Expertise: Optical Metrology, X-Ray Optics, Scatterometry, Semiconductor Physics, Microelectronics, CD & Overlay Metrology
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Profile Summary

Engineer in Physics, Electronics and Materials, then PhD in Nanotechnologies, I have a significant background in optics and metrology. Currently working for the European Synchrotron (ESRF) in the X-Ray Optics Group, I am involved in the characterization of multilayer mirrors (thickness and roughness measurements).
Previously, I have been working as a PhD student and a junior engineer at STMicroelectronics for 3 years. I was in charge of the optimization of the scatterometry technique for advanced CMOS node lithography, and more precisely for double patterning lithography. I implemented a specific methodology to gain in sensitivity and accuracy in critical dimension and overlay measurements. I developed a Matlab code to simulate the sensitivity of diffraction-based overlay and scatterometry targets. I have confronted simulation results to experimental data acquired on wafers in clean room environment.
I am interested in acting in ambitious projects combining physics and engineering. Project management would be an extra motivation.

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