Dr. Anthony Yen

Fellow Member | Vice President at ASML
Yen, Anthony
SPIE Leadership: Retrieving Data, please wait...
SPIE Membership: 23.0 years
SPIE Awards: Fellow status | 2020 SPIE Community Champion
SPIE Involvement: Retrieving Data, please wait...
Area of Expertise: Optical Physics, Nanopatterning, EUV Lithography, Semiconductor Technology
Contact Details:
Sign In to send a private message or view contact details

Profile Summary

Anthony Yen is Vice President and Head of Technology Development Center at ASML. He received BSEE from Purdue University and SM, EE, PhD, and MBA from MIT. He was Member of Technical Staff at Texas Instruments and was on assignment at IMEC. From 1997 to 2017, apart from three years at Cymer (now part of ASML), he was with TSMC where he first led the development of its lithography processes, making TSMC the first company to adopt 193-nm lithography in the manufacture of logic integrated circuits, and then co-led infrastructure development for next-generation-lithography technologies on assignment at SEMATECH; in his last ten years of career at TSMC, he led the development of EUV lithography, including its mask technology, for high-volume manufacturing. Yen is Fellow of SPIE and IEEE. He is a recipient of the Frits Zernike Award for Microlithography from SPIE and the Outstanding Electrical and Computer Engineer Award from Purdue University. He serves as a Distinguished Lecturer for the IEEE Electron Devices Society.

Upcoming Presentations

Most Recent | Show All
Retrieving Data, please wait...


Most Recent | Show All
Retrieving Data, please wait...

Conference Committee Involvement

Most Recent | Show All
Retrieving Data, please wait...

Course Instructor

Most Recent | Show All
Retrieving Data, please wait...
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research