H1 hexapole photonic crystal nanocavities with theoretical and measured quality factors exceeding 10^8 and 10^6

K. Takata; E. Kuramochi; A. Shinya; M. Notomi

doi:10.1117/12.2646628

15 March 2023 H1 hexapole photonic crystal nanocavities with theoretical and measured quality factors exceeding 10⁸ and 10⁶

K. Takata, E. Kuramochi, A. Shinya, M. Notomi

Author Affiliations +

Proceedings Volume 12431, Photonic and Phononic Properties of Engineered Nanostructures XIII; 1243106 (2023) https://doi.org/10.1117/12.2646628
Event: SPIE OPTO, 2023, San Francisco, California, United States

Abstract

We report and elaborate the design of a hexapole mode of an H1 point-defect photonic crystal nanocavity with a theoretical quality (Q) factor over 10⁸. Thanks to the C₆ symmetry of the mode, our design uses only four structural modulation parameters, unlike that for many other ultrahigh-Q nanocavities based on complicated optimizations. Silicon (S_i) planar H1 nanocavity samples prepared with the design exhibit a systematic variation in their resonant wavelengths by the spatial shift of air holes in 1 nm unit. Their maximum loaded Q factor is measured as 1.2 million, and the corresponding cavity’s intrinsic Q factor is estimated as 1.5 million.

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Citation Download Citation

K. Takata, E. Kuramochi, A. Shinya, and M. Notomi "H1 hexapole photonic crystal nanocavities with theoretical and measured quality factors exceeding 10⁸ and 10⁶", Proc. SPIE 12431, Photonic and Phononic Properties of Engineered Nanostructures XIII, 1243106 (15 March 2023); https://doi.org/10.1117/12.2646628

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