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Proceedings Paper

Electron-Beam Directly Written Micro Gratings For Integrated Optical Circuits
Author(s): H. Nishihara; Y. Handa; T. Suhara,; J. Kovama
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Paper Abstract

The principles and techniques of writing various types of micro gratings directly on chalcogenide (As2S3) film waveguides using the electron beam are reviewed. A computer-controlled apparatus has been developed so that we can fabricate any gratings of uniform/ chirped periods with slant lines which have the area of the order of 1 mm2, the diffraction efficiency of nearly 100 %, and the minimum grating period of 0.2 µm. Combination of those micro gratings results in integrated grating circuits (IGC). An IGC for guided-beam multiple division has been successfully fabricated.

Paper Details

Date Published: 25 February 1981
PDF: 8 pages
Proc. SPIE 0239, Guided Wave Optical and Surface Acoustic Wave Devices: Systems and Applications, (25 February 1981); doi: 10.1117/12.959199
Show Author Affiliations
H. Nishihara, Osaka University (Japan)
Y. Handa, Osaka University (Japan)
T. Suhara,, Osaka University (Japan)
J. Kovama, Osaka University (Japan)

Published in SPIE Proceedings Vol. 0239:
Guided Wave Optical and Surface Acoustic Wave Devices: Systems and Applications
Chen S. Tsai, Editor(s)

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