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Proceedings Paper

Design rules for catadioptric scatterometers based on measurement requirements
Author(s): Wenjing Zhao; Cornelius Hahlweg; Hendrik Rothe
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Paper Abstract

The large variety of scatterometric applications and basic scatterometer principles demands design rules to fit the final instrument as well as the data processing and user interface into the requirements of the application in scope. In the current paper we concentrate on the optical design of scatterometers based on a combination of an elliptical mirror and a secondary imaging lens system. The design strategy involves the Scheimpflug principle on two different scales and demands various compromises concerning spot size and angular resolution. The strategy is demonstrated on a practical example.

Paper Details

Date Published: 1 September 2010
PDF: 9 pages
Proc. SPIE 7792, Reflection, Scattering, and Diffraction from Surfaces II, 77920B (1 September 2010); doi: 10.1117/12.860173
Show Author Affiliations
Wenjing Zhao, Helmut Schmidt Univ. (Germany)
Cornelius Hahlweg, Helmut Schmidt Univ. (Germany)
Hendrik Rothe, Helmut Schmidt Univ. (Germany)

Published in SPIE Proceedings Vol. 7792:
Reflection, Scattering, and Diffraction from Surfaces II
Zu-Han Gu; Leonard M. Hanssen, Editor(s)

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