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Proceedings Paper

Microfabrication of refractive optics, waveguides, microfluidics, and high-aspect ratio structures realized by direct laser lithography
Author(s): Pierre Blanchet; Cécile Aubert; Nicolas Brillouet; Paul Coudray
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Paper Abstract

Microlens, micromirrors, quantum dots and microfluidics networks are some elements illustrating the need of miniaturisation for optics. This paper presents examples of high aspect ratio microstructures obtained with Dilase technology, a direct laser lithography technique in photosensitive layers. Vectorial writing associated with specific laser beam treatment allows imagine fast prototyping and production of a large range of MOE. Integrated optical circuits, such as optical MUX/DEMUX and splitters are strongly used in telecommunication and sensors industries. Microlens arrays, micromirrors present a large potential for imagery sector. "Lab on a chip" integrating microfluidic and optical waveguides systems are useful for medical diagnosis.

Paper Details

Date Published: 24 February 2009
PDF: 9 pages
Proc. SPIE 7205, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics II, 720513 (24 February 2009); doi: 10.1117/12.808153
Show Author Affiliations
Pierre Blanchet, Kloé SA (France)
Cécile Aubert, Kloé SA (France)
Nicolas Brillouet, Kloé SA (France)
Paul Coudray, Kloé SA (France)

Published in SPIE Proceedings Vol. 7205:
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics II
Thomas J. Suleski; Winston V. Schoenfeld; Jian Jim Wang, Editor(s)

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