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Proceedings Paper

Long-term tests of compact excimer lasers
Author(s): Andreas Görtler; Ansgar Matern; Claus Strowitzki
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Paper Abstract

During the recent years extensive development of laser tube and pulsed power module in compact excimer laser systems has been done. Aim of all development was the enlargement of lifetimes and reduction of cost of ownership. Therefore, new laser chamber designs have been developed, tested and optimized. Especially the discharge unit was new designed. Additionally, a new generation of pulsed power modules has been developed. By replacing the solid state switch element by a faster device the efficiency of the module was enlarged and the matching to the discharge was improved. Due to the reduction of electrode erosion the lifetime of the laser chamber is enlarged. These new components were integrated in a new experimental laser system and tested to verify the estimated prolongation of laser tube lifetime. In long-term tests of this new laser tube connected with the newest generation of the pulsed power module at 193 nm wavelength, 8 mJ constant energy and 1 kHz repetition rate have been done. A laser chamber lifetime of more than 5 billion pulses was achieved during the first long-term tests. Implementing further improvement the lifetime of the laser chamber could enhanced to more than 6 billion pulses under these test conditions. The lifetime of the pulsed power module exceeds this high lifetime, no degradation of components in the pulsed power module was found.

Paper Details

Date Published: 26 April 2007
PDF: 7 pages
Proc. SPIE 6346, XVI International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers, 63460P (26 April 2007); doi: 10.1117/12.738122
Show Author Affiliations
Andreas Görtler, Coherent GmbH (Germany)
Ansgar Matern, Coherent GmbH (Germany)
Claus Strowitzki, Coherent GmbH (Germany)

Published in SPIE Proceedings Vol. 6346:
XVI International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers
Dieter Schuöcker, Editor(s)

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