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Proceedings Paper

High-speed precision surface profilometry using large phase shifting
Author(s): Masaaki Adachi; Kakuji Ueda
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Paper Abstract

We propose a new vertical-scanning profilometry which has high-speed in measurements. The proposed profilometry measures 3-D shape by using phase-shifting technique with large phase shifts around 6 π ± π /2. With such large shifts, 2 π phase ambiguities normally suffer precise measurements of shapes. Therefore, the profilometry is equipped with two short-coherent-light sources of different mean-wavelength and alternately acquires interferogram for each wavelength every large phase shift (one interferogram /one shift). From the interferograms acquired through vertical scanning , it searches the highest-contrast frame position regarding the each wavelength and calculates the phases with the searched frames. From the phases of the two wavelengths and a vertical-scanning step height (relating to the large phase shifting), 3-D profile is calculated with a precision as high as a well-known phase-shifting interferometry.

Paper Details

Date Published: 30 September 2003
PDF: 10 pages
Proc. SPIE 5264, Optomechatronic Systems IV, (30 September 2003); doi: 10.1117/12.515164
Show Author Affiliations
Masaaki Adachi, Kanazawa Univ. (Japan)
Kakuji Ueda, Kanazawa Univ. (Japan)

Published in SPIE Proceedings Vol. 5264:
Optomechatronic Systems IV
George K. Knopf, Editor(s)

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