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Proceedings Paper

Exact computation of scalar 2D aerial imagery
Author(s): Ronald L. Gordon
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Paper Abstract

An exact formulation of the problem of imaging a 2D object through a Koehler illumination system is presented; the accurate simulation of a real layout is then not time- limited but memory-limited. The main idea behind the algorithm is that the boundary of the region that comprise a typical TCC Is made up of circular arcs, and therefore the area - which determines the value of the TCC - should be exactly computable in terms of elementary analytical functions. A change to integration around the boundary leads to an expression with minimal dependence on expensive functions such as arctangents and square roots. Numerical comparisons are made for a simple 2D structure.

Paper Details

Date Published: 12 July 2002
PDF: 12 pages
Proc. SPIE 4692, Design, Process Integration, and Characterization for Microelectronics, (12 July 2002);
Show Author Affiliations
Ronald L. Gordon, IBM Corp. (United States)


Published in SPIE Proceedings Vol. 4692:
Design, Process Integration, and Characterization for Microelectronics
Alexander Starikov; Alexander Starikov; Kenneth W. Tobin Jr., Editor(s)

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