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Proceedings Paper

Laser technologies for manufacturing of advanced materials and devices
Author(s): Jan J. Dubowski
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Paper Abstract

As demand is growing for devices capable of performing new and increased numbers of operations within an ever shrinking physical volume the laser has become an increasingly important tool helping to overcome the limitations of conventional microfabrication techniques. In addition to classical applications of lasers such as via hole drilling, trimming or pulsed laser deposition of thin films, there have been new developments of laser-based technologies for the fabrication of advanced micro- and nano-devices. Of particular interest for optoelectronic and photonic applications is the potential of the laser for the fabrication of integrated and monolithically integrated photonic devices and circuits.

Paper Details

Date Published: 7 June 2000
PDF: 4 pages
Proc. SPIE 3933, Laser Applications in Microelectronic and Optoelectronic Manufacturing V, (7 June 2000); doi: 10.1117/12.387595
Show Author Affiliations
Jan J. Dubowski, National Research Council Canada (Canada)

Published in SPIE Proceedings Vol. 3933:
Laser Applications in Microelectronic and Optoelectronic Manufacturing V
Henry Helvajian; Koji Sugioka; Malcolm C. Gower; Jan J. Dubowski, Editor(s)

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