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Proceedings Paper

MEMS physical analysis in order to complete experimental results return
Author(s): Xavier Lafontan; Christian Dufaza; Guy Perez; Francis Pressecq
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Paper Abstract

The emerging MicroElectroMechanical Systems (MEMS) technologies are entering in an active phase of high volume production and successful commercial applications. The expertise and the qualification for space application of such devices have already begun. But these technologies are still recent and important efforts on the reliability issue have to be done. This paper defines the role oftechnological analysis in the actual MEMS design process. Afterwards, it presents MEMS technological analysis techniques developed at CNES applied to an open MEMS technology. In particular, it is shown how these technological analyses respond to designer needs and that the designer and the founder still need a strong interaction. We also present the MEMS reliability issue at CNES and replace it in the current world's one.

Paper Details

Date Published: 10 April 2000
PDF: 8 pages
Proc. SPIE 4019, Design, Test, Integration, and Packaging of MEMS/MOEMS, (10 April 2000); doi: 10.1117/12.382299
Show Author Affiliations
Xavier Lafontan, LIRMM/Univ. de Montpellier and Ctr. National d'Etudes Spatialesde Montpellier and Centre (France)
Christian Dufaza, LIRMM/Univ. de Montpellier (France)
Guy Perez, Ctr. National d'Etudes Spatiales (France)
Francis Pressecq, Ctr. National d'Etudes Spatiales (France)

Published in SPIE Proceedings Vol. 4019:
Design, Test, Integration, and Packaging of MEMS/MOEMS
Bernard Courtois; Selden B. Crary; Kaigham J. Gabriel; Jean Michel Karam; Karen W. Markus; Andrew A. O. Tay, Editor(s)

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