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Proceedings Paper

Specular and diffuse x-ray scattering from tungsten/carbon multilayers having a high reflectivity at 10 keV
Author(s): Albert T. Macrander; Randall L. Headrick; Chian Liu; Jenny Erdmann; Ali M. Khounsary; Karl W. Smolenski; S. Felix Krasnicki; Jozef Maj
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Paper Abstract

X-ray scattering measurements at 10 keV from multilayers having a period of 24.8 Angstrom and consisting of 100 W/C bilayers are reported. Specular scans revealed first order reflectivities in the range 73.5% to 78.0% with bandpasses in the range of 1.5% to 1.7%. Total roughness (or interface grading) values deduced from fitting were in the range 2.5 to 3.0 angstrom for the last-to-grow surface of the W layers. Diffuse scattering measurements were made in a novel geometry that permitted investigation of in-plane momentum transfers up to 0.2 Angstrom-1. This is roughly an order of magnitude larger than is possible in conventional rocking scans. A power law dependence of the diffuse scattering after integration over a 'Brillioun zone' is found. The exponent of this power law, 1.75, when interpreted using a logarithmic correlation function leads to a value of 1.0 angstrom for the correlated roughness.

Paper Details

Date Published: 11 December 1998
PDF: 12 pages
Proc. SPIE 3448, Crystal and Multilayer Optics, (11 December 1998); doi: 10.1117/12.332517
Show Author Affiliations
Albert T. Macrander, Argonne National Lab. (United States)
Randall L. Headrick, Cornell Univ. (United States)
Chian Liu, Argonne National Lab. (United States)
Jenny Erdmann, Argonne National Lab. (United States)
Ali M. Khounsary, Argonne National Lab. (United States)
Karl W. Smolenski, Cornell Univ. (United States)
S. Felix Krasnicki, Argonne National Lab. (United States)
Jozef Maj, Argonne National Lab. (United States)

Published in SPIE Proceedings Vol. 3448:
Crystal and Multilayer Optics
Albert T. Macrander; Andreas K. Freund; Tetsuya Ishikawa; Dennis M. Mills, Editor(s)

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