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Proceedings Paper

Micro-optical distance sensor fabricated by the LIGA process
Author(s): Hajime Nakajima; Patrick Ruther; Juergen Mohr; Toshiro Nakashima; Kazuo Takashima; Teruo Usami
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Paper Abstract

An ultra-miniaturized sensor head for absolute measurement which has a size of less than 5 mm cube is realized. The sensor works by means of the optical triangulation. To achieve the optical function, the sensor consists of a three layer polymer waveguide patterned by X-ray lithography, an incoupling fiber and two detection fibers and micro cylindrical lenses which are also fabricated by X-ray lithography. The fibers and the cylindrical lenses are placed into the waveguide without any active alignment by using waveguide walls as guiding and fixing structures. The ratio of intensity detected in the two detection fibers is a measure for the distance between the object and the sensor. The detection range of the sensor is 1 to 6 mm between the sensor and an object with diffusively reflecting surface.

Paper Details

Date Published: 2 September 1998
PDF: 7 pages
Proc. SPIE 3513, Microelectronic Structures and MEMS for Optical Processing IV, (2 September 1998); doi: 10.1117/12.324264
Show Author Affiliations
Hajime Nakajima, Mitsubishi Electric Corp. (Japan)
Patrick Ruther, Forschungszentrum Karlsruhe (Germany)
Juergen Mohr, Forschungszentrum Karlsruhe (Germany)
Toshiro Nakashima, Mitsubishi Electric Corp. (Japan)
Kazuo Takashima, Mitsubishi Electric Corp. (Japan)
Teruo Usami, Mitsubishi Electric Corp. (Japan)

Published in SPIE Proceedings Vol. 3513:
Microelectronic Structures and MEMS for Optical Processing IV
M. Edward Motamedi; Hans Peter Herzig, Editor(s)

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