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Proceedings Paper

Comparison of submicron particle counting and sizing results from different sensors in semiconductor process chemicals
Author(s): Dumitru Gh. Ulieru
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Paper Abstract

The measurement of particle size and concentration in Di-water and various chemicals has permitted us to verify the performance of more high sensitivity sensors. The size of these particles have been determined by specialized instrumentation. The paper presents the comparison results of sizing accuracy and concentration measurement for ultrapure liquids. The results of sizing accuracy as shown for sensors due of light scattering for latex spheres in Di and silicon spheres in chemicals. The concentration measurement (particles/100 ml) made with more sensors against factor leads to identify which sensors are sensitive in Di water and which in chemicals and permit the measurement of their sensitivity and the counting efficiency too. The study permitted the best results for measurement of Di and ultrapure chemicals for particle counting and sizing recommended for all minielectronics fabs.

Paper Details

Date Published: 25 August 1997
PDF: 10 pages
Proc. SPIE 3213, Process, Equipment, and Materials Control in Integrated Circuit Manufacturing III, (25 August 1997); doi: 10.1117/12.284648
Show Author Affiliations
Dumitru Gh. Ulieru, ROMES SA (Romania)

Published in SPIE Proceedings Vol. 3213:
Process, Equipment, and Materials Control in Integrated Circuit Manufacturing III
Abe Ghanbari; Anthony J. Toprac, Editor(s)

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