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Proceedings Paper

Micro laser assisted single point diamond turning of brittle and hard materials
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Paper Abstract

This article summarizes laser assisted single point diamond turning (SPDT) of select brittle and hard materials, using the μ-LAM process. These materials all have significant industrial importance in the modern day. It is shown that the μ-LAM process can produce smooth surfaces, with roughness values range from 40 nm RMS down to subnanometer RMS.

Paper Details

Date Published: 2 March 2020
PDF: 6 pages
Proc. SPIE 11267, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXV, 112670Z (2 March 2020); doi: 10.1117/12.2547009
Show Author Affiliations
Hossein Shahinian, Micro-LAM, Inc. (United States)
Jayesh Navare, Micro-LAM, Inc. (United States)
Charan Bodlapati, Micro-LAM, Inc. (United States)
Dmytro Zaytsev, Micro-LAM, Inc. (United States)
Di Kang, Micro-LAM, Inc. (United States)
Deepak Ravindra, Micro-LAM, Inc. (United States)


Published in SPIE Proceedings Vol. 11267:
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXV
Gediminas Račiukaitis; Carlos Molpeceres; Jie Qiao; Aiko Narazaki, Editor(s)

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