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Research on the key technology for processing efficiency improvement of aluminum alloy mirror chemical mechanical polishing
Author(s): Tao Zhao; Xiaoqiang Peng; Hao Hu; Chaoliang Guan; Yifan Dai
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Paper Abstract

In order to improve the processing efficiency on the basis of obtaining good surface quality for aluminum alloy mirror with the chemical mechanical polishing(CMP) method, the status between abrasives and workpiece surface is researched adopting the elastic plastic deformation and nano indentation theory. The material removal mechanism is revealed through the CMP material removal model which is established on the analysis of surface topography, particle force and removal efficiency. It is found that the discontinuous down pressure which is related to surface morphology of the polished pad has a serious influence upon removal efficiency as well as the original pressure and the rotate speed of pad. With the support of these results, a variable parameter polishing method is proposed. The actual experiment result shows that the processing time is shortened by about 64% compared with the original method on a Φ100mm plane sample in the process of roughness improvement from Ra 5.03nm to Ra 2.95nm. The validation of variable parameter CMP method is certificated.

Paper Details

Date Published: 18 December 2019
PDF: 10 pages
Proc. SPIE 11341, AOPC 2019: Space Optics, Telescopes, and Instrumentation, 1134116 (18 December 2019); doi: 10.1117/12.2543939
Show Author Affiliations
Tao Zhao, National Univ. of Defense Technology (China)
Hu'nan Key Lab. of Ultra-Precision Machining Technology (China)
Xiaoqiang Peng, National Univ. of Defense Technology (China)
Hu’nan Key Lab. of Ultra-Precision Machining Technology (China)
Hao Hu, National Univ. of Defense Technology (China)
Hu’nan Key Lab. of Ultra-Precision Machining Technology (China)
Chaoliang Guan, National Univ. of Defense Technology (China)
Hu’nan Key Lab. of Ultra-Precision Machining Technology (China)
Yifan Dai, National Univ. of Defense Technology (China)
Hu’nan Key Lab. of Ultra-Precision Machining Technology (China)


Published in SPIE Proceedings Vol. 11341:
AOPC 2019: Space Optics, Telescopes, and Instrumentation
Suijian Xue; Xuejun Zhang; Carl Anthony Nardell; Ziyang Zhang, Editor(s)

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