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Proceedings Paper

Al mirrors in vacuum ultraviolet region
Author(s): Fengli Wang; Shuangying Li; Hongjun Zhou; Tonglin Huo; Zhanshan Wang
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Paper Abstract

Aluminum mirrors with high reflectivity have a wide range of applications in the vacuum ultraviolet, such as for space observation, synchrotron radiation. Due to the oxidation of Al has great effect on the reflectivity below the wavelength of 160 nm, Al-protected mirrors have experienced significant development over the past years, particularly like Al overcoated with LiF, MgF2. This paper focuses on Al mirror over-coated with LiF, MgF2 and LiF+MgF2 in the wavelength range of 105-130 nm. The mirrors are prepared by three steps thermal boat evaporation method. The reflectivity of mirrors in the wavelength range of 105~130 nm is measuring at the National Synchrotron Radiation Laboratory (NSRL) of China, and the structural properties have been analyzed using grazing incidence X-ray reflectometer. Compared the reflectivity of samples placed in the relative humidity of 40%, the reflectivity of Al + LiF mirrors has dropped significantly within 2 months, while the reflectivity of Al+MgF2 mirrors almost has no change within 30 months. The reflectivity of Al +LiF+MgF2 mirrors stored in the relative humidity of 40% performs well within 4 months and we will further study the time stability.

Paper Details

Date Published: 19 November 2019
PDF: 6 pages
Proc. SPIE 11185, Optical Design and Testing IX, 111850L (19 November 2019); doi: 10.1117/12.2537954
Show Author Affiliations
Fengli Wang, Tongji Univ. (China)
Shuangying Li, Tongji Univ. (China)
Hongjun Zhou, Univ. of Science and Technology of China (China)
Tonglin Huo, Univ. of Science and Technology of China (China)
Zhanshan Wang, Tongji Univ. (China)

Published in SPIE Proceedings Vol. 11185:
Optical Design and Testing IX
Yongtian Wang; Pablo Benítez; Osamu Matoba, Editor(s)

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