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Proceedings Paper

Impact of process parameters on super-smooth surface of the fused silica created by magnetorheological finishing: simulation and experimental study
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Paper Abstract

To achieve the super-smooth surface of the fused silica via using the magnetorheological finishing (MRF) technique, the synergistic effect of the rotational speed, viscosity, and working gap is well investigated. According to the pressure field simulation based on the two-dimensional Reynold equation, the working gap is of remarkable importance to the surface roughness among three parameters. Furthermore, such result is also revealed by the MRF experiment. Accordingly, the optimized process parameters are identified, and the final surface roughness is achieved as low as 0.22 nm.

Paper Details

Date Published: 10 May 2019
PDF: 10 pages
Proc. SPIE 11068, Second Symposium on Novel Technology of X-Ray Imaging, 110681V (10 May 2019); doi: 10.1117/12.2524636
Show Author Affiliations
Jiabao Liu, Institute of Machinery Manufacturing Technology (China)
Yunfei Zhang, Institute of Machinery Manufacturing Technology (China)
Jianwei Ji, Fudan Univ. (China)
Xiaoyuan Li, Institute of Machinery Manufacturing Technology (China)
Minheng Ye, Institute of Machinery Manufacturing Technology (China)
Chao Wang, Institute of Machinery Manufacturing Technology (China)


Published in SPIE Proceedings Vol. 11068:
Second Symposium on Novel Technology of X-Ray Imaging
Yangchao Tian; Tiqiao Xiao; Peng Liu, Editor(s)

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