Aiming at the problem of poor uniformity and large amplitude of aspherical small-scale waviness caused by grinding aspheric surface by traditional grating parallel grinding technology, in this paper, the reasons for the poor uniformity of aspherical small-scale waviness in traditional grating parallel grinding technology are analyzed from the perspective of grinding force. Considering the influence of the uniformity of the grinding force during the grinding process on the aspherical small-scale waviness, an up-grinding grating parallel grinding method and a down-grinding grating parallel grinding method are proposed. The effects of the grinding force of the two grinding methods on the aspherical small-scale waviness uniformity are analyzed experimentally. Finally, among these three grating parallel grinding methods, the aspherical small-scale waviness obtained by the down-grinding grating parallel grinding method is the most uniform and the waviness amplitude is the smallest, the waviness amplitude is less than 2μm.

Date Published: 10 May 2019
PDF: 9 pages
Proc. SPIE 11068, Second Symposium on Novel Technology of X-Ray Imaging, 1106817 (10 May 2019); doi: 10.1117/12.2524257

Published in SPIE Proceedings Vol. 11068:
Second Symposium on Novel Technology of X-Ray Imaging
Yangchao Tian; Tiqiao Xiao; Peng Liu, Editor(s)