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Proceedings Paper

Ultra-compact MEMS FTIR spectrometer
Author(s): Yasser M. Sabry; Khaled Hassan; Momen Anwar; Mohamed H. Alharon; Mostafa Medhat; George A. Adib; Rich Dumont; Bassam Saadany; Diaa Khalil
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Paper Abstract

Portable and handheld spectrometers are being developed and commercialized in the late few years leveraging the rapidly-progressing technology and triggering new markets in the field of on-site spectroscopic analysis. Although handheld devices were commercialized for the near-infrared spectroscopy (NIRS), their size and cost stand as an obstacle against the deployment of the spectrometer as spectral sensing components needed for the smart phone industry and the IoT applications. In this work we report a chip-sized microelectromechanical system (MEMS)-based FTIR spectrometer. The core optical engine of the solution is built using a passive-alignment integration technique for a selfaligned MEMS chip; self-aligned microoptics and a single detector in a tiny package sized about 1 cm3. The MEMS chip is a monolithic, high-throughput scanning Michelson interferometer fabricated using deep reactive ion etching technology of silicon-on-insulator substrate. The micro-optical part is used for conditioning the input/output light to/from the MEMS and for further light direction to the detector. Thanks to the all-reflective design of the conditioning microoptics, the performance is free of chromatic aberration. Complemented by the excellent transmission properties of the silicon in the infrared region, the integrated solution allows very wide spectral range of operation. The reported sensor’s spectral resolution is about 33 cm-1 and working in the range of 1270 nm to 2700 nm; upper limited by the extended InGaAs detector. The presented solution provides a low cost, low power, tiny size, wide wavelength range NIR spectral sensor that can be manufactured with extremely high volumes. All these features promise the compatibility of this technology with the forthcoming demand of smart portable and IoT devices.

Paper Details

Date Published: 5 May 2017
PDF: 8 pages
Proc. SPIE 10210, Next-Generation Spectroscopic Technologies X, 102100H (5 May 2017); doi: 10.1117/12.2268078
Show Author Affiliations
Yasser M. Sabry, Si-Ware Systems (Egypt)
Ain-Shams Univ. (Egypt)
Khaled Hassan, Si-Ware Systems (Egypt)
Momen Anwar, Si-Ware Systems (Egypt)
Mohamed H. Alharon, Si-Ware Systems (Egypt)
Mostafa Medhat, Si-Ware Systems (Egypt)
George A. Adib, Ain-Shams Univ. (Egypt)
Rich Dumont, Si-Ware Systems (Egypt)
Bassam Saadany, Si-Ware Systems (Egypt)
Diaa Khalil, Si-Ware Systems (Egypt)
Ain-Shams Univ. (Egypt)

Published in SPIE Proceedings Vol. 10210:
Next-Generation Spectroscopic Technologies X
Mark A. Druy; Richard A. Crocombe; Steven M. Barnett; Luisa T. Profeta, Editor(s)

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