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Proceedings Paper

Light scattering on nanoaggregates in bulk indium phosphide materials
Author(s): Jean-Marc Lussert; Paul C. Montgomery; Jean-Pierre Fillard; Jacques Bonnafe
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Paper Abstract

The scattering by small particules of an incident light beam of a prescribed polarisation is an important scientific problem. This study demonstratres that the distribution of microprecipitates included in semiconductor wafers, can be revealed and studied by scattering phenomena. Two kinds of scattering experiments have been carried out : Laser Scanning Tomography (LST) and Angular Scattering Analysis (ASA). ASA is based on scattering of an infra-red laser beam by microprecipitates contained in bulk material. The scattered light is collected by a camera and the corresponding signal sent to a computer. ASA is concerned with measuring the scattered intensity as a function of the scattering angle. LST also consists of analysing light scattered by microdefects. This technique has already been described in details in references 1,2 and 3. Scattering is a wide and complex mathematical problem, depending on a large number of parameters. The theoretical section of this paper refers to the Mie theory of single scattering for different particle shapes. Investigations have been performed on InP material, manufactured by the Liquid Encapsulated Czochralsky (LEC) technique. The samples were pulled in the <111> or <100> directions and were undoped, doped (Sn,S,Fe) or co-doped (Cds, S-Ge). This presentation gives results in terms of the evolution of the manufacturing quality, according to density, size of microprecipitates, and homogeneity of their distribution.

Paper Details

Date Published: 1 December 1990
PDF: 6 pages
Proc. SPIE 1331, Stray Radiation in Optical Systems, (1 December 1990); doi: 10.1117/12.22646
Show Author Affiliations
Jean-Marc Lussert, Univ. des Sciences et Techniques du Languedoc (France)
Paul C. Montgomery, Univ. des Sciences et Techniques du Languedoc (France)
Jean-Pierre Fillard, Univ. des Sciences et Techniques du Languedoc (France)
Jacques Bonnafe, Univ. des Sciences et Techniques du Languedoc (France)

Published in SPIE Proceedings Vol. 1331:
Stray Radiation in Optical Systems
Robert P. Breault, Editor(s)

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