This paper introduces a new way of two-dimensional wavefront reconstruction based on the Fourier modal method. Expending the target wavefront by using Fourier series, calculating the expansion coefficient based on the differential phase measured from the experiment, and fitting the coefficients at the missing points by averaging adjacent values, the target wavefront could be reconstructed eventually by using inverse Fourier transform on the expansion coefficients. The paper also introduces our numerical simulation study on the precisions of both the wavefront reconstruction under ideal situation and under the situation with simulated noise respectively. Corresponding verification experiment for the two-dimensional wavefront reconstruction based on the Fourier modal method is also done by using a two-grating lateral shearing interferometry system, with the 3D profile of the sample obtained.

Date Published: 28 February 2017
PDF: 11 pages
Proc. SPIE 10256, Second International Conference on Photonics and Optical Engineering, 1025642 (28 February 2017); doi: 10.1117/12.2257884

Published in SPIE Proceedings Vol. 10256:
Second International Conference on Photonics and Optical Engineering
Chunmin Zhang; Anand Asundi, Editor(s)