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Proceedings Paper

Use of two focusing modes on two-lens focused ion-beam column
Author(s): Tohru Ishitani; Y. Kawanami
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Paper Abstract

On focused ion beam (FIB) milling there is a demand for FIBs of high current densities in wide diameter range for high-speed milling with good positional accuracy. There is also a demand for extremely fine FIBs to form scanning ion microscope images with high resolution. Coarse guidelines in designing the two-lens FIB column are obtained from a locus of the characteristic point on beam diameter vs. beam current (d - Ip) curve in logarithmic scale. Here, the characteristic point is the intersection of two lines corresponding to d equals the Gaussian beam spot and d equals the chromatic aberration's spot. The coarse design shows that two focusing modes on the two-lens column is answerable to their demands. The representative FIB specifications of two focusing modes are also described.

Paper Details

Date Published: 25 September 1995
PDF: 8 pages
Proc. SPIE 2522, Electron-Beam Sources and Charged-Particle Optics, (25 September 1995); doi: 10.1117/12.221592
Show Author Affiliations
Tohru Ishitani, Hitachi, Ltd. (Japan)
Y. Kawanami, Hitachi, Ltd. (Japan)

Published in SPIE Proceedings Vol. 2522:
Electron-Beam Sources and Charged-Particle Optics
Eric Munro; Henry P. Freund, Editor(s)

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