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Proceedings Paper

Nanowire grid polarizers for mid- and long-wavelength infrared applications
Author(s): Matthew C. George; Bin Wang; Rumyana Petrova; Hua Li; Jonathon Bergquist
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Paper Abstract

High contrast wire grid polarizers on silicon suitable for mid-wavelength infrared (MWIR) and long-wavelength infrared (LWIR) applications have been developed using wafer-scale aluminum nanowire patterning capabilities. The 144 nm pitch MWIR polarizer typically transmits better than 95% of the passing polarization state from 3.5-5.5 microns while maintaining a contrast ratio of better than 37dB. Between 7 and 15 microns, the broadband LWIR polarizer typically transmits between 55 and 90% of the passing state and has a contrast ratio better than 40 dB. A narrowband 10.6 micron polarizer shows about 85% transmission in the passing state and a contrast ratio of 45 dB. Transmission and reflection measurements were made using various FTIR spectrometers and compared to RCWA modeling of the wire grid polarizer (WGP) performance on antireflection-coated wafers. Laser Damage Threshold (LDT) testing was performed using a continuous wave CO2 laser for the broadband LWIR product and showed a damage threshold of 110 kW/cm2 in the blocking state and 10 kW/cm2 in the passing state. The MWIR LDT testing used an OPO operating at 4 microns with 7 ns pulses and showed LDT of 650 W/cm2 in the blocking state and better than 14 kW/cm2 in the passing state

Paper Details

Date Published: 18 June 2013
PDF: 8 pages
Proc. SPIE 8704, Infrared Technology and Applications XXXIX, 87042E (18 June 2013); doi: 10.1117/12.2016221
Show Author Affiliations
Matthew C. George, MOXTEK Inc. (United States)
Bin Wang, MOXTEK Inc. (United States)
Rumyana Petrova, MOXTEK Inc. (United States)
Hua Li, MOXTEK Inc. (United States)
Jonathon Bergquist, MOXTEK Inc. (United States)

Published in SPIE Proceedings Vol. 8704:
Infrared Technology and Applications XXXIX
Bjørn F. Andresen; Gabor F. Fulop; Charles M. Hanson; Paul R. Norton; Patrick Robert, Editor(s)

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