High contrast wire grid polarizers on silicon suitable for mid-wavelength infrared (MWIR) and long-wavelength infrared (LWIR) applications have been developed using wafer-scale aluminum nanowire patterning capabilities. The 144 nm pitch MWIR polarizer typically transmits better than 95% of the passing polarization state from 3.5-5.5 microns while maintaining a contrast ratio of better than 37dB. Between 7 and 15 microns, the broadband LWIR polarizer typically transmits between 55 and 90% of the passing state and has a contrast ratio better than 40 dB. A narrowband 10.6 micron polarizer shows about 85% transmission in the passing state and a contrast ratio of 45 dB. Transmission and reflection measurements were made using various FTIR spectrometers and compared to RCWA modeling of the wire grid polarizer (WGP) performance on antireflection-coated wafers. Laser Damage Threshold (LDT) testing was performed using a continuous wave CO₂ laser for the broadband LWIR product and showed a damage threshold of 110 kW/cm₂ in the blocking state and 10 kW/cm₂ in the passing state. The MWIR LDT testing used an OPO operating at 4 microns with 7 ns pulses and showed LDT of 650 W/cm₂ in the blocking state and better than 14 kW/cm₂ in the passing state

Date Published: 18 June 2013
PDF: 8 pages
Proc. SPIE 8704, Infrared Technology and Applications XXXIX, 87042E (18 June 2013); doi: 10.1117/12.2016221

Published in SPIE Proceedings Vol. 8704:
Infrared Technology and Applications XXXIX
Bjørn F. Andresen; Gabor F. Fulop; Charles M. Hanson; Paul R. Norton; Patrick Robert, Editor(s)